Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10

High Vacuum L Type Valve

This will allow for incremental spacing to prevent harmful large initial surge. 10 XL-OMV0017 5. Construction and Dimensions 5-1.

Free Mount Cylinder Series CU

CQS Single Acting, Spring Return (mm) D-M9, D-M9W D-M9V, D-M9WV D-A9, D-A9V Bore size (mm) CQ2 Stroke A B W A B W A B W 6 2.5 (5) 6.5 4.5 4 4 0 All stroke 17.5 17.5 13.5 RQ 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 1.5 (1) 2.5 0.5 7.5 7.5 3.5 CQM 16 2 (0.5) 2

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 1 4 5 32 5 16 5 16 One-touch fitting One-touch fitting 6, 10 KM11 3 8 1 2 1 4 One-touch fitting 3 8 NPT NPT NPT thread 6, 10 KM12 Applicable Tubing Tube material Tube O.D.

Compact Manifold Regulator Series ARM5

37.5 6.5 6 11.5 40.5 8, 5/16 223 VVQ1000-90-17 5 13.5 21 40.5 474 Compact Manifold Regulator Individual Supply Type Series ARM5B How to Order ARJ AR425 to 935 B ARM5 A 4 07 AMR Individual supply type ARM 2.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

New

J J IN OUT H G A 2 x P Port size B B1 2 x M Depth 5 H B1 G A 2 x P Port size B i b Faston type D 11 Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1/4, 3/8 1/2 3/4 1 H J M 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 4) Values for the low wattage (0.5 W) specifications. 2 position double (Double solenoid) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 3 position closed center 4 position dual 3 port valve (B) 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 4 2 5 3 1 1 (P) 5 (R1) 3 (R2) N.O.

58

Refer to Minimum Stroke for Auto Switch Mounting on page 22. 1/5 stroke 364 341 133 40 75 318 110 1/5 stroke 388 367 141 40 75 346 120 S + Stroke H + Stroke H Foot: CS2WL W V A K F G Port Cushion valve 4 x J AL A K F G 2 x P (Rc, NPT, G) With rod boot AL MM MM D D E E e C LY LH 4 x LD LT B l f LX Y X N X N Y Width across flats KA Width across flats KA h + l LS + Stroke C B ZZ + 2 x l + 2

Air Slide Table Series MXS

K 18.5 8.5 5 8.5 5 NA x M4 x 0.7 thread depth 5 8 10 5 9.5 J I Max. 11 (With stroke adjuster at retraction end) 8 4.75 Operating port 2 x M5 x 0.8 9.5 2 4H9 depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9 9 4.2 8.5 B A 8.5 18.5 8.5 18.5 H G (NN 1) x H Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35

Programless controller (with stroke study) Step motor (servo 24 VDC)

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A / COM B-3 Green 3 COM-B / A-3 Blue 4 3 3m Shield 5 5m Cable color Terminal no. Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B-1 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 A-1 3 S Standard cable signal Terminal no.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Smooth Cylinders Low Speed Cylinders (mm) Rail mounting Auto switch model D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lW/J79W D-F7lV/F7lWV D-F79F D-J79C D-F7BA D-F7BAV D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7m D-A80 D-F7NT D-A79W A B A B A B A B A B A B Bore size 10 4.5 4.5 0.5 0.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 16 5 5 1 1 3.5 3.5 4 4 9 9 1 1 Adjust the auto switch after confirming

Model Selection 1

4 P. 17-5-117 Elbow LQ2L 5 VXA 2 VN 3 Female LVC 4 P. 17-5-118 5 LVA 2 LVH 3 Male LVD 4 P. 17-5-119 Run tee LQ2R 5 LVQ 2 LQ 3 Female LVN 4 P. 17-5-120 5 TI/ TIL 2 PA 3 Male PAX 4 P. 17-5-121 Branch tee LQ2B 5 PB 2 3 Female 4 P. 17-5-122 5 2 3 Union elbow LQ2E 4 P. 17-5-123 5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

8 Product image For PROFIBUS DP (Plug, B-coded) Socket Plug Plug Socket Number of functional poles M12: 2 pins M12: 3 pins M12: 4 pins Key type B-coded (Reverse key) 3 4 4 3 5 1: VP 4: B Line 5 1: 2: A Line (Green) 3: 4: B Line (Red) 5: 390 1 2 2 1 Pin assignment 220 2: A Line 3: DGND Plug, B-coded Plug, B-coded (Viewed from the plug/socket side) 390 Fixed cable length 5 m Cable O.D

ALF400 to 900, ALT-5/-9

) 8 8 . 0 ( 4 9 . 1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T

Mini Free Mount Cylinder

5 M3 x 18 l 5 18 5 M3 x 18 l 5 18 5 M3 x 18 l Note) Only M2.5 x 37 l is made of stainless steel.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Compact Cylinder

and (B + stroke) for 5 mm stroke will be the same as those for 10 mm stroke.