EXxx-OMS0026CN

Enable 1 Disable Enable 1 2 2 Disable Enable 100 msec 3 Disable 0.1 ms 1.0 ms 4 1.0 ms 10 ms 20 ms 1.0 ms 15 ms 5 15 ms 100 ms 200 ms Enable Val165000 4 ON/OFF ON/OFF 6 3 Disable ON/OFF 0 83 ON/OFF 7 1(EX600-DXPC1EX600-DXNC1) 22 OFF 0.5 mA ()OFF 0.5 mA 3 OFF 0.5 mA 3 4x1000 -45No.EX-OMS0026CN No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

ported type only) 25.5 1 20.5 2 Connector Type 34.5 1 26.5 2 Connector If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32, 40 50, 63 80, 100 BT-06 Bore size (mm) 32 40 50 63 80 100 Mounting bracket BT-03 BT-05 (1) Foot MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 A set of following stainless steel mounting screws is attached. (A mounting bracket itself is not attached. Please order it separately.)

Rotary Gripper Series MRHQ

Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Note: 1in = 25.4mm 1MPa = 145psi 80 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 4 Rotary Gripper Series MRHQ Effective Gripping Force Effective

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Metal seal 0.1 to 0.7 MPa (1) External pilot pressure range How to order valves Rubber seal VQZ215 5M 02 T 0.15 to 0.7 MPa 0.2 to 0.7 MPa ( ( VQZ100: Poppet (1) 100 kPa to 0.7 MPa Operating pressure range Thread type (Cylinder port and 1(P), 3(R) port) Note 1) For the high pressure type, the upper limit of max. operating pressure and external pressure range is 1 MPa.

CQM

1 !2 !3 !4 !5 !6 !

Clean Gas Filter

pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

Table of Contents

to cylinder, Needle fully open (2) Load ratio {(Load weight x 9.8) Theoretical output} x 100% Speed at the end (u) Time (s) SOL: ON(OFF) 1-2-4 1-2-5 4 Series SV Air Cylinders Drive System Full Stroke Time and Speed at the End Air Cylinders Drive System Full Stroke Time and Speed at the End Series SV3000 Applicable bore size: 50, 63, 80, 100 Series SV4000 Applicable bore size: 63, 80, 100

LEKF-OMZ0035

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

Multistage Ejector Series ZL112/212 1

Tank capacity: 1 Supply pressure: 0.4 MPa Tank capacity: 1 Supply pressure: 0.4 MPa Time to Reach Vacuum Time to Reach Vacuum 100 90 100 90 Vacuum pressure reached 89.3 kPa Vacuum pressure reached 89.3 kPa 80 kPa 80 kPa 80 80 Vacuum pressure in tank (kPa) Vacuum pressure in tank (kPa) 66.7 kPa 66.7 kPa 70 70 60 60 53.3 kPa 53.3 kPa 50 50 40 kPa 40 kPa 40 40 26.7 kPa 26.7 kPa 30 30 20 20 13.3

ZR

Dimensions: ZR1-FX Circuit diagram Suction filter 1 1 1 1 1 1 (Mounting hole) Suction filter M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

Support Guide/11-LEFG Series

limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5 0.4

CL

Additional weight with air cushion 0.01 0.01 0.02 0.02 Additional weight for long stroke 0.01 0.01 0.02 0.03 No. of auto switches mounted Auto switch model Calculation: (Example) CLG1LA20-100 (Foot, 20, 100 st) Basic weight Additional weight Air cylinder stroke Additional weight of air cushion 0.72 + 0.05 x 100/50 + 0.01 = 0.83 kg 1 2 D-B5/B64 D-C7/C80 D-H7 D-G5/K5 0.72 0.05/50 st 100

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement