Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

AC Servo Motor Driver (Pulse input type/Positioning type)

DI-1 Program Description SPN (1000) STA (200) STB (300) MOV (1000) TIM (100) MOV (2000) STOP Speed (Motor speed) Acceleration time constant Deceleration time constant Absolute move command Dwell command time Absolute move command Program end 1000[r/min] 200[ms] 300[ms] 1000[10STMm] 100[ms] 2000[10STMm] a) b) c) d) e) f) b) Acceleration time constant (200ms) c) Deceleration time constant (

CXS

D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state

CXS

D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VQ20/30

VDW Option Enter together in order, counting from station 1 on the D side. 20 20 stations None DIN rail mounting DIN rail mounting (Without DIN rail) Nil D DO VQ VX2 U side D side Stations321 VX VX3 VXA A port VN P1 LVC How to Order Valves (For Manifold) LVA VQ M C6 2 1 1 1 G LVH Series/ Orifice size LVD Port size Symbol 2 3 Series VQ20 VQ30 LVQ VQ20 VQ30 Symbol C6 C8 C10 C12 Port size

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Values at the initial period) VFN Base mounted JIS Symbol Solenoid Specifications Option Grommet (G), Plug connector (L), Plug connector (M), DIN terminal (D) 100, 200, 24 , 48 , 110 , 220 Electrical entry DC AC 50/60 Hz Coil rated voltage (V) 24, 6 , 12 , 48 Allowable voltage fluctuation (%) 15 to +10% of rated voltage Caution Coil insulation type Class E or equivalent (120C) (2) Temperature

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

HEC_W-E

D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. D C o n s t a n t M O D E < 0 . 0 s e c When 0 is set, this function becomes invalid. 8-8 Operation 7.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

0.02 End plate (PBT) (UL94-V0) End plate (PBT) (UL94-V0) 0.01 0.005 50 100 200 500 1000 2000 5000 10 20 Sound absorbing material (PVF) Sound absorbing material (PVF) Air flow (l/min (ANR)) Noise Level (Initial conditions) Case (PBT) (UL94-V0) Case (PBT) (UL94-V0) Hexagonal flats D Hexagonal flats D AN202 to 402 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance:

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

IZx-OMP0064

to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 Energy saving static neutralization

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Air cylinder

C Single clevis D Double clevis Max.stroke(mm) Bore size Refer to the table 1 of max. stroke T Center trunnion 125 125mm 140 140mm 160 160mm 180 180mm 200 200mm 250 250mm 320 320mm 11 - 3.

Rotary Cylinder Series MRQ

Reed auto switch: D-A7/A8 Solid state auto switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

Fieldbus system EtherNet/IP compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table 4 )Standard DProduced upon receipt of order Stroke (mm) Model 200 400 300 500 600 700 800 900 1000 1200 1500 LEJS40 LEJS63 ) ) ) D D ) ) ) ) D D D D ) ) D ) D D D 4: Strokes other than those shown above are produced as special order (1 mm increments).

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

CLS

C D T Single clevis type Double clevis type Center trunnion type Nil D Without magnet (Without auto switch) Built-in magnet Bore size Cylinder Tube material With auto switch 125 mm 140 mm 160 mm 180 mm 200 mm J K Nil N R H Symbol 125 140 160 180 200 250 Without auto switch 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm Nylon tarpaulin Heat resistant tarpaulin With double-side cushion Without