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J Gas~et ,fd(~speed ,c:o..ntroJ.ler NBR CK40-1697 Clamp Cylinder: Series CK1 Auto Switch Specifications Applicable Auto Switch Auto switch type Mount type Auto switch model Electrical entry Length of lead w ire D-B5 B6 tYo. D-B7 . B8 type Grommet type O.5m (Standard) 3m (Option) Reed switch type Band mount D-A3 type Terminal conduit type D-A4 type DIN connector type D-G7. K7 type D-G5.

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Cylinder with Lock Series MNB

Series Variations Applicable auto switch models Standard variations Lock system Standard stroke (mm) Bore size (mm) Solid state switch Reed switch Type Model Action Series Built-in auto switch magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

MXS

CB Solid state switch: D-F9B, D-F9N, D-F9P, D-F9BW, D-F9NW, D-F9PW CV/MVG B Stroke B Stroke E Model Operating range A CXW 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 10 2 9.6 9.6 9.6 21.6 27.6 -0.4 -0.4 -0.4 11.6 17.5 CXS 11.6 2.5 14.9 9.9 10.9 18.9 26.9 51.9 4.9 -0.1 0.9 8.9 16.9 41.9 15.6 3 32.4 22.4 12.4 14.4 24.4 45.4 74.4 22.4 12.4 2.4

Standard Combinations

D-DN This catalog is printed on recycled paper with concern for the global environment.

RSH

***D-A7l, D-A8l, D-F7l and D-J7l are available as option. 4.3-2 Heavy Duty Stopper Cylinder Series RSH Models Applicable auto switch Construction Action Bore size (mm) Reed switch Solid state switch Rod end configuration Mounting Fixed mounting height D-Y5 D-Y6 D-Y7 Double with spring Single/spring extend Flange 20, 32 50, 63 80 D-Z7 D-Z8 Lever with built-in shock absorber MK/MK2 Specifications

CEx-OML0058

50 40 40 100 100 300 300 200 400 500 200 400 500 D o e s t h e m o u n t e d l o a d / P i s t o n s p e e d ( /) e x c e e d t h e l o a d g i v e n i n P i s t o n s p e e d ( /) t h e d i a g r a m ? H o r i z o n t a l m o u n t i n g V e r t i c a l m o u n t i n g S e l e c t i o n ..

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Refrigerated Thermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub9 (Male receptacle) P2: Serial RS-485 D-sub9 (Female receptacle) P1: Contact input/output D-sub25 (Female receptacle) Power cable entry E S O L C SMC N E P O Rear side 93 Series HRZ Operation Panel Display Description No.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting (when using the cylinder tube threads) E t E t Compatible Mounting Bolt Dimensions A type mounting B type mounting Model Mounting bolt size D: Bolt length (mm) E (mm) C (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB30-D MQQTB40-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB30-D MQQLB40

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

VCA

Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

KN Series Nozzles for Blowing

L1 Applicable fitting size d Pivoting nozzle with self-align fitting/KNK (mm) Model Nozzle size D L1 M Width across flats H1 H2 Applicable tubing O.D.

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.