EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

2/3 Port Valve

VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

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PE 12 E Bracket Main port R J D 1 2 3 I O M C N H B P: For mounting 4 locations G A Air Operated Type A B C D E F G H I J K L M N O Model SGHA130-10 SGHA230-3015 SGHA230-7015 SGHA330-3020 SGHA330-7020 SGHA430-3025 SGHA430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

D-DN

AC Servo Motor Driver (CC-Link Type)

600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

VDW

Enter together in order, counting from station 1 on the D side.

CL

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

VM

D.

10

D-G

3 Port Solenoid Valve Metal Seal Series VZ200 1

) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134 8 139 150 9 155 166 10 171 182 Symbol L1 L2 4-15-8 9 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Dimensions: Common Exhaust Individual: VV3Z2-50 (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage

Compact

l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12 14 PA PB 107 L1 = 43n + 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17

Possible to transfer a workpiece at low-speed.

Auto switch Nil D None Built-in magnet Refer to page 308 for the part no. of auto switches.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Multistage Ejector Series ZL112.212

Note 2) Fixed unit: kPa ZY Vacuum pressure sensor ZF None Vacuum port adaptor Rc 1/8 Vacuum pressure gauge Digital pressure switch for vacuum Nil GN G D With digital vacuum pressure switch ZP Output specifications (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) SP N P A B C D E F NPN open collector 1 output PNP open collector 1 output

Air Cylinder NCM Series Stainless Steel Cylinders

D -With Built in Magnet (Not available as std. on single acting models, XB6 & XB7) I XBg -Low Friction I XCO -Stainless Steel Rod LNumber of Auto-swircnes -2 pcs. S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

LX Series Compact Electric Actuators

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Pneumatic Purification

460/3/60 FLANGE 3 150 174 R134a 1060 5 PDE410-S 1483 13.5 15.0 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1180 6 PDE510-S 1840 15.5 17.8 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1200 8.5 PDE610-S 2400 20.0 22.8 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1400 10 *Voltage Option : add C for 575/3/60; Example : PDE200-SC Flow readings at 100OF inlet

Gun Type Ionizer

: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.