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[L/min]) (PD) = (Pr b) / a = [800 0] / 0.25 = 3200 -79No.PF-OMZ0002-A IO-Link parameter setting IODD file IODD (I/O Device Description) is a definition file which provides all properties and parameters required for establishing functions and communication of the device.

2 q w e r t y !1 !0 o i u Component Parts No.

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Port size For sub-plate, manifold type 40, 41, 42, 43 Nil: Without sub-plate R port P, E port 3: Common exhaust type for main and pilot valve D: Push-turn locking slotted type R port P, E port (With gasket and screws) 01: 1/8 With sub-plate Electrical entry 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24,12 VDC 100,110, 200, 220 VAC Grommet L plug connector M

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil F N T Rc G NPT NPTF VR Body type Body ported Base mounted 2 4 Port size VH Valve option VPA342 VPA344 VPA542 VPA544 VPA742 VPA744 Port size Rc Without sub-plate 1/8 1/4 3/8 1/2 Symbol Nil V Standard Vacuum VPA544 VHS Nil JIS Symbol Option Option

RSH20, 32 Graphq Graphw 1.0 RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] 0.8 1300 1300 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 600 600 0 500 100 200 300 400 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63,

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

Signal contents 1 24 VDC + Operating environment Ambient temperature: 0 to 40C, Humidity: 20 to 80%RH, (no condensation) L 100-240 VAC 2 24 VDC 1 2 E PE DC output connection Thermo-con (HEF002-A6, INR-244-831) N E Not for use with other products The power supply cable can only be used for the applicable models shown below. Do not use it for other products.

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

Eccentric distance Stroke Operating pressure: 0.5 MPa 1000.0 Plate allowable lateral load (N) 100.0 100 Load weight (kg) 63 63 50 10.0 50 40 32 40 1.0 32 10 0.1 10 100 1000 Maximum piston speed (mm/s) 0 10 20 30 40 50 60 70 80 90 100 110 120 Stroke + Eccentric distance (mm) Relationship between Number of Needle Rotations and Piston Speed 32, 40 50, 63 800 800 32 32 50 700 700 600 600 63 Piston

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

Bleed port AU AF Handle locking screw AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Caution No.

Internal circuit and example of wiring Caution Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution Circuit Vcc D1 1. Pressure setting While pressing q SET, turn pressure-setting slotted screw e P.SET (counterclockwise to decrease) and watch the LCD.

100 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] Low noise nozzle with male thread Copper extension nozzle 1200 900 VMG1-08-350-:3.5 1100 KNS-R02-110-8 800 VMG1-08-300-:3 1000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 700 VMG1-08-250-:2.5 900 800 VMG1-06-200-:2 600 KNS-R02-090-8 700 500 600 400 500 KNS-R02