Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.

Multistage Ejector Series ZL112/212 1

AC specifications (50/60 Hz) Vacuum pressure sensor 100 V 200 V 110 V [115 V] 220 V [230 V] 1 2 3 4 Nil GN G E EB EE None Vacuum adapter Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E Electrical entry G H L LN LO M MN MO Lead wire length 0.3 m Lead wire length 0.6 m Lead wire length

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch fittings w Replacement Element Part No. e q Part no.

CXT

8 e CXTM Carbon steel Aluminum alloy Hard anodized Hard chrome plated Cylinder tub !

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

/

Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

125

t w t Port 3(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

VCA

Manifold body e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w e r Part no.

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

Compact Rotary Actuator Series CRQ2

2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

21

2 i e @ A @ C @ B Boss-cut Clevis integrated Note No.

Air Catch Sensor

When the product is installed, leave a space of 60 mm on the side of the valve guide (opposite to the knob) for maintenance and inspection. -10No.PS-OMF0007-E Model Indication and How to Order : It is not possible to order only without control unit and with control unit. -11No.PS-OMF0007-E -12No.PS-OMF0007-E Summary of Product parts Names of individual parts -13No.PS-OMF0007-E Definition

Thermo-con

R T T N E K I ETL LISTED CONFORMS TO M C AC EXT.SENSOR CERTIFIED TO UL STD 60601-1 US C D L I E S T 3054524 Circulating fluid outlet Rc1/4 CAN/CSA STD C22.2 NO.601.1 THERMO-CON HEC002-A5B-F MODEL No.

RHC

MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E

Speed Controller with Indicator

3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Manifold Specifications

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5