HRX-OM-Q026 Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)
Meter-out Graph/Pressure to time Meter-in Graph/Pressure to time Movement of the cylinder by fixed throttle valve c ontrol valve d e Movement of the cylinder e p s y b er by meter control Pressure Stroke Pressure Stroke Pressure Stroke e cylind ement of th PH Delay in pressure transmission Mov PR (Atmospheric pressure) Delay in pressure transmission PR (Atmospheric pressure) During the operating
Handle operated type Air operated type VBA1110 VBA200 VBA400 Model AV Max. 2 Pressure increase ratio VBA2200-03 VBA4200-04 VBA1110-02 VBA1-02 VBA2100-03 VBA4100-04 Note) 400 60 1000 1900 1000 1900 Max. flow (l/min (ANR)) VBA1 2 to 4 AU 1/2 (IN/OUT) 1/4 (IN/OUT) Connection port size Rc 3/8 (IN/OUT) 3/8 (IN/OUT) 1/2 (IN/OUT) Fluid Compressed air 1/4 Exhaust port size Rc 3/8 1/2 1/2 3/8 VBA1110
S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.
6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.
(Between lead wire and the case) 1000 m/s2 300 m/s2 Impact resistance 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute 1) (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire and case) Withstand voltage Except magnetic resistant 2-color indication type solid state switch (DP5DWL/P5DWSC).
G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5
port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
One-touch fitting is mounted on the plate. 600 mm Note 1000 mm Insertion error checking ridge If only the fitting is needed, order with one of the part numbers below. e Fitting Part No. Description Barb fitting One-touch fitting PV060-73-1A KJS02-M3 Socket Part no.
A: Orange B: Green 17.5 16 14 12.5 17 15 (Rail mounting hole pitch 12.5) Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .
Material Aluminum die-casted (SX3000: Zinc die-casted) Note White Body q Adapter plate White White White Resin Resin w e End plate Pilot body Piston Spool valve assembly Molded coil r Resin t Resin y Aluminum, HNBR Gray u Resin Caution Replacement Parts Part no. SX340 SX540 SX740 Mounting Screw Tightening Torques No.
Exploded view q r How to Calculate the Flow Rate u For obtaining the flow rate, refer to front matters 44 to 47. t y e o i o Magnifying figure Self-up screw 2 1 3 1504
7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No. Blue None u Purple White i Gray Black o Lead wire color Dot marking Terminal no. White Black !0 Black None q White Red !1 Brown None w Yellow Red !2 Red None e Orange Red !
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
(ANR) c V -~ AM~4S0 E V ;;2 1 -E t~ AM~350 ~ ~ 2 ~05 -tV 'ct! AM~2S0 1. Select the point of contact A of inlet pressure and max. air flow capacity in the graph. V j.--v v V AMl,so 0.2 Ij.--~ V I 2.Select the type whose max. air flow capacity is over that point; AMH650. 0.2 0.4 0.6 0.8 1.0 tnlet air pressure MPa SeriesAMH How to Order .
, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5 5.5 4 10 50 8.5 12.5 7.5 4 12.5 E The
Body material Port size Orifice diameter e VXS2 3 A w B 5 Body material C37 Port size 1/4 e A Orifice diameter 10 Step 3 Select electrical specification.
Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !
L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2