XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

ML2B

[Horizontal and lateral mounting] A B SOL.3 W RE A B A magnetic field of 14.5 mT is equivalent to a position that has about 18 cm radius from a welded part using about 15,000 amperes of welding amperage. When using it in a stronger magnetic field, cover the sensor with magnetic and shield it.

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223

Transfer

MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

CQS

C(D)QSB D(M) Bore size Stroke SMC Clean Series The rod portion of the actuator has a double seal construction, and a relief port is provided to discharge the exhaust air directly outside of the clean room. Thus, it can be used in a Class 100 clean room.

MHL2

A B C D E F G H 54 96 116 Model MHL2-20D MHL2-20D1 MHL2-20D2 58 100 120 71 113 133 38 80 100 82 142 162 122 222 262 160 260 300 32 68 88 12-4-10 11 Parallel Style Wide Opening Air Gripper Series MHL2 Dimensions MHL2-25D MHZ Closed J MHF 2-M8 x 1.25 thread depth 7 (Mounting thread) A cross view (Fingers closed) MHL MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

MXH

100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm D1 10 10 -X 0.1 1 Weight m (kg) Weight m (kg) Weight m (kg) 20 16 10 6 201 20 20 16 Data 0.01 0.1 16 10 10 6 6 0.001 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (12) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (6) Load

2/3 Port Valve

flow of 100 l/min.

CRQ2

The rotation angle can be adjusted between 90 to 190. n o ti r a a n t o g Rotation starting point 10 10 e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at a n t o g Rotation starting point End of rotation A A R e A Lmax Lmax Size 20 30 40 Lmax 24 27 31.5 Size 10 15 20 30 40 Size 20 30 40 Rotation starting point 15 18 24 27 31.5 24 27 31.5 10 End of rotation

CY1F

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420mm/s in Graph 3.

Compact

I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

“Going to

100 X Chloroform 100 X Trichloroethylene 100 X Phenol Group Phenolnitro Saturated Nitrobenzene 100 Ester/Ether Group Ethylether 100 Butyl acetate 100 X X Dioctyl phthalate Ethylacetate 100 X X Petroleumether 100 Dibutylphthalate Tricledylphosphate 1.4-dioxin 100 Tetrahydrofuran 100 X X Hydrocarbon Group Benzene 100 X Butane 100 Hexane 100 Isoctane 100 Cyclohexane 100

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Compact Manifold Regulator

A ARP w y IR-A IR r IRV i VEX SRH !

53

Use this as a reference.

3

to 63 32 to 63 A B U B A U D-P3DWA 32 to 63 U B A Auto Switch Proper Mounting Position D-F7/J79 D-F7V D-J79C/F7W D-F7WV D-F7BA D-F7BAV D-F79F/J79W D-A7H/A80H D-A73C/A80C D-A72 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-A79W D-A73 D-A80 D-F7NT D-P3DWA Bore size (mm) A 25.0 24.0 26.0 19.5 23.5 24.0 A 28.0 27.0 29.0 22.5 26.5 27.0 A 30.5 29.5 31.5 25.0 29.0 29.5 B 10.0 12.0 13.0 13.0