Low-Speed Rotary Actuator IC Grommet Yes Reed circuit 100V A93V*2 A93 Relay, 2-wire 24V 12V PLC No 100V or less A90V A90 IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1m type lead wire is only applicable to D-A93.
Bore size (mm) Auto switch model 20 25 32100 D-A9(V) D-M9(V) BMG2-012 D-M9W(V) D-M9A(V) D-P3DWA BMG2-012 D-P3DW BMG6-025S D-P4DW BMG1-040 21 - Revision history Initial release 2000.5.31 Revised 1 2000.8.8 Revised 2 2015.5.26 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change w
A water-resistant type cylinder is recommended for use in an environment which requires water resistance. *2 1 m type lead wire is only applicable to D-A93.
Compact Guide Cylinder/Wide Type MGPW Series 20, 25, 32, 40, 50, 63 How to Order MGP M W 25 M9BW 50 Compact Guide Cylinder Made to Order For details, refer to page 499. Wide type Bearing type M L A Number of auto switches Nil S n Slide bearing Ball bushing High precision ball bushing 2 pcs. 1 pc. n pcs.
Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.
Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,
Accessories -XB6 Heat resistant cylinder (-10 to 150C) w/o auto switch only Note 1) MK-A012Z MK-A016Z MK-A020Z 12 16 20 25 32 40 50 63 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer -XC22 Fluororubber seals Note 2) Note 1) Except 12 and 16. Note 2) The bumper is a standard product.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25,
SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25,
SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Single acting, single rod, compact cylinder , Bore sizes *: 12, 16, 20, 25,
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, ACTUATOR, CQ2-Z COMPACT CYLINDER, PE, 63MM CQ2-Z DBL-ACT AUTO-SW, 4.62970 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, ACTUATOR, CQ2-Z COMPACT CYLINDER, PE, 63MM CQ2-Z DBL-ACT AUTO-SW, 4.71238 lb
SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25,
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, COMPACT, ACTUATOR, CQ2-Z COMPACT CYLINDER, PE, 63MM CQ2-Z DBL-ACT AUTO-SW, 4.82909 lb
SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25,
Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9NA--Solid State, Water Resist., 3 Wire NPN, Horizontal, Lead Wire
Magnet: D (Built-in), Mounting: L (Foot), Type: Standard, Bore Size: 32mm, Port Thread Type: TN (NPT 32-100 Bore), Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector
Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 40mm, Port Thread Type: TN (NPT 32-100 Bore), Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State , Gen.
Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 40mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired