Soft Start-up Valve

VAC]*1 V V V V 4 220 VAC [230 VAC]*1 V V V V AC (50/60 Hz) t d Rated coil voltage DC 5 24 VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

IZS30_eng

The place where ambient humidity exceeds 35 to 85% RH. c. The place where dew condensation is generated due to sudden temperature change. d. The place where there is corrosive gas, inflammable gas, and volatile inflammable substance is stored. e.

Possible to transfer a workpiece at low-speed.

A33 A34 A43 A34 A37 C 7 C 7 C12 C11 C12 -X 6 -X 6 Chart 3, 4, 5 Chart 3, 4 Chart 4, 5 Combination is available only when all the conditions are fulfilled among the nation chart above.

AC Servo Motor Driver (CC-Link Type)

(One station of programmable driver remote device station) (c) Max. number of connected units: 42 Note that the following conditions must be satisfied. {(1 a) (2 b) (3 c) (4 d)} 64 a: Number of 1-station occupying units b: Number of 2-station occupying units c: Number of 3-station occupying units (not available for LECSC-) d: Number of 4-station occupying units (not available for LECSC-)

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Flow Control Equipment

When it reaches B, the head pressure (PH) rises quickly as indicated by the line from C to D. Therefore, there is no time loss associated with the pressure transmission lag indicated by the line from C to E, as in the case of meter-in control that is effected through the use of a speed controller.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

Fieldbus system EtherCAT compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

S

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-Y7WV D-Z7 D-Z8 D-Y69 D-Y7PV D-Y59 D-Y7P D-Y7W D-Y7BAL 5 10 15 20 10 5 10 15 20 1 pc. 10 10 20 25 15 10 10 15 20 2 pcs.

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

ChemicalThermo-con

Signal contents A DC output B DC output C DC output 1) Common to HED003-C2A, HED005-C2A, HED007-C2A RS-485 D DC output E DC output Pin No. Signal contents D C F DC output 1 RS-485 BUS + 5 4 3 DC connector (HED007-C2l) G FG 2 RS-485 BUS 2 1 3 Unused 4 Unused 3.

Support Guide/11-LEFG Series

side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02 LEFG16 0.05 0.03 LEFG25 0.05 0.03 11LEJS LEFG32 0.05 0.03 0 0 100 200 300 400 500 25ALEFG40 0.05 0.03 Load W [N] Note

PFxx-OMX0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -92No.PF-OMX0002-B Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

Series VCL

Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm

E-MY2B_E_A

(3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

ends a w t o u i Resin materials eliminated Laser marking is employed for the model designation. d t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s