SMC Corporation of America
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C Current consumption The current necessary to operate each unit. DIN rail A metal rail conforming with DIN (German) standard. D D Side The side connected to the End plate when the product is connected to a manifold. Abbreviation of international (ingress) protection.

(c)When a sensor is not connected.

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Gasket Spacer Note 1) M5 and U10/32 type: Stainless steel Retaining ring for hole type C Note 1) M5 and U10/32 type: Stainless steel 585 Series AS1F-D Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric Size Inch Size d T H D1 D2 D3 L1 L2 L3 L4 L5 AM1 A Weight (g) Model Model Weight (g) d T H D1 D2 D3 L1 L2 L3 L4 L5 M1 AS121F-U10

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

350 400 50 100 150 200 250 300 350 400 Stroke MXY6 2 3 3 4 39 34 59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating range

to the D-B53/B54, D-C73(C)/C80C, D-A93(V), D-A73(C)/A80C, DA53/A54, D-Z73, and D-90/97/90A/93A only. 4) For reed auto switches M8 and M12 type with connector, please contact SMC. 5) The standard lead wire length of the trimmer auto switch is 3 m. 6) The standard lead wire length of the solid state auto switch with the timer except for the D-P3DW and D-M9A (V), water-resistant 2-color

Avoid using in a place that exceeds an ambient humidity range. c. Avoid using in a place where condensation occurs due to a drastic temperature change. d. Avoid using in a place in the presence of corrosive or explosive gas or where there is a volatile combustible. e.

Gasket Spacer Note 1) M5 and U10/32 type: Stainless steel Retaining ring for hole type C Note 1) M5 and U10/32 type: Stainless steel 737 AS1F-D Series Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric Size Inch Size d T H D1 D2 D3 L1 L2 L3 L4 L5 AM1 A Weight (g) Model Model Weight (g) d T H D1 D2 D3 L1 L2 L3 L4 L5 M1 AS121F-U10

D A B Traveling accuracy (mm) Model D side against B side C side against A side LTF8 LTF6 0.02/200 or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

C *Applicable stroke Standard produced upon receipt of order *produced upon receipt of order (Only Robotic type cablecan be selected) 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable

(per unit) Applicable model A B C D HRSE012-AHRSE018-AHRSE024-A240 (335) 505 (540) HRW HRS-TK003 HECR HRSE012-A--T HRSE018-A--T HRSE024-A--T 240 (335) 555 (590) HEC HEB HED HEA IDH Anchor bolt (M8) D C (Prepared by user) Anti-quake bracket Material: Zinc steel plate Mounting view A B w Bypass Piping Set Note) To be mounted by user.

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling