Manifold Specifications

side U side DIN rail DIN rail holding screw Manual override (Non-locking) Applicable connector D-SUB { } JIS-X-5101 MIL-C-24308 Terminal no. 1 (Rail mounting hole pitch 12.5) D side connector (Station n)(Station 1) (mm) 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 9 223 212.5 200 11.5 10 248 237.5 216 16 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 5.5 6.6 9 9 9 12 14 5.5 6.6 9 9 9 12 14 44 48 60 74 78 100 120 44 48 60 74 78 100 120 114 136 167 190 211 237 264 Double clevis style: (D) Clevis pins and cotter pins are included.

Fieldbus system EtherCAT compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

Platform Cylinder Series CXT

15 20 5 CXT 32 40 1 10 10 5 10 15 5 2 10 15 10 10 15 5 (mm) D-F7W D-J79W D-F7BAL D-F7NTL D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted CXT 32 40 1 5 5 10 15 15 20 2 5 10 15 15 20 20 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-M9W D-M9AL

Digital Flow Switch (Integrated display type) ( compatible)

Min. to Max. a to b c to d PF3W7 oC Common 0 to 100 -10 to 110 0 to 1000 -100 to 1100 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

CXWM/CXWL

and D-A8. ( mm) Note 1) The dimensions show D-A7 and D-A8. ( mm) Ht 15 Hs 12.5 Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hv 10.5 Ht 15 Hw 23 D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C 15

MXS

70 75 80 GA 22 22 22 22 55 61 102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Applicable connector Internal wiring Non-polar, +COM Location Valve 4(A), 2(B) port piping spec.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Flat ribbon cable connector Socket: 26 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction

LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

High performance type Step Motor Controller (Servo/24 VDC)

Ground construction is Class D grounding. (Ground resistance 100 or less) (3) Make the grounding as close as possible to the electric actuator and shorten the distance to ground. [Unpackaging] Cution (1) Check the received product is as ordered.

Valve Single Unit

connector type) Manifold (c) DIN rail release button U side Position for increasing stations (a) Bolt (b) Block separation (c) DIN rail release button lever Lid D side Replacement Parts Description SX3000 Part no.

CRQ2

M ab BA BA BB D (AU)Max.

CXT

Wire specification Reed switch Solid state switch D-F9B(V) D-F9BW(V) D-F9BAL D-F9N(V) D-F9P(V) D-F9NW(V) D-F9PW(V) D-A90(V) D-A93(V) Oil proof vinyl cab tire cord 2.7 0.18mm2 X 2 cores (brown, blue) Oil proof vinyl cab tire cord 2.7 0.15mm2 X 3 cores (brown, black, blue) D-A96(V) D-A72(H) D-A73(H)(C) D-A76H D-A80(H)(C) D-A79W D-J79(C)(W) D-F7BV D-F7BWV D-F7BAL Oil proof vinyl cab tire cord

SFOD-OMT0005CN

(LE ) ,, () EMG() 1000 1 -69- /(Best Pneumatics No(2)) 17.2 () () -70- 17.3. 90 100 (DC24V)SVON () a) b) c) d) e) D (100) -71- 17.4. 1. 2. () 3. () 4. 5. 6. 7. 8. () 9. 1000m (-10603585%) -72- 17.5 5 17.6.

LECP6_C

B RESET 49 - +JOG +1-052 B RESET 1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON

Plug-in/Plug Lead: Single Unit

34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 D side entry (LD) ( 261.5 with AMC810-14 installed) 216 with AMC610-10 installed D side U side D side U side 100 with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

C MTS MY Side support B MY-SB CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model

3

4/16/40 100 250 C C D A B Voltage output 1.5 V 6 mA 1.4 V 1.8 V 1 V 5 V 0.6 V 1 V Voltage output Current output 5.6 mA 7.2 mA 4 mA 20 mA 2.4 mA 4 mA Current output Minimum Model Rated flow [L/min] C D Maximum B PF3W B 5 V 5.4 V Voltage output PF3W704/504 PF3W720/520 PF3W740/540 PF3W711/511 PF3W721/521 0.5 2 5 10 50 4 A 20 mA 21.6 mA Current output A 16 40 0 Flow rate Minimum Maximum rated