2/3 Port Valve

Air operated External pilot solenoid Selection procedures Table q Applicable fluid check list Body material Seal material BC6: Standard Aluminum: L Stainless steel: S NBR : A FPM : B EPR : C NBR : A FPM : B EPR : C NBR : A FPM : B EPR : C Fluid Fluid Air (Standard, Dry) Low vaccum (1 torr) Refer to Table q to check that the desired fluid is applicable.

VZ100/300/500

1 3 Port Solenoid Valve Rubber Seal Series VZ100/300/500 Series Variations V100 Port size Type of actuation Voltage Series Electrical entry With light/surge voltage suppressor (Option) Manual override Sonic conductance C [dm3/(sbar)] SY SYJ VK VZ100 For N.C.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Calculation: (Example) CS1WL125-500 Basic weight 18.14 (Foot style, 125) Additional weight2.57/100 stroke Cylinder stroke500 stroke 18.14 + 2.57 x 500/100 = 30.99 kg Class 2 Pressure Vessel In the case of exceeding the following strokes, the cylinder is subject to Class 2 Pressure Vessel Act.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

M/C M/C Flow control for each branch line Applications For the control of metal wire tension For air blow For flow control of N2 gas to prevent lead frame oxidation Detection camera N2 blow prevents the distortion of camera images due to air turbulence.

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

High Power Cylinder:

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (

CM2

51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 68 81 93 106 131 156 12.5 25 37.5 50 75 100 48 61 73 86 111 136 36 18.2 25 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 40

0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

Ionizer Nozzle type IZN10 Series IZS

Suitable for static neutralization at a long distance (max. 500 mm).

PFxx-OMS0001CN

[P_2][n_2] [] [H_2] [] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMS0001CN-A b. () [P2L][n2L] [] () [P2H][n2H] [] [H2] [] [F 2] OUT2 500 L/min OUT1 -39No.PF-OMS0001CN-A c. 0999,999,999 L 3 /OUT1 (3 ) [P2AH][n2AH] [] 1 (6 ) [P2AL][n2AL] [] 1 [F 2] OUT2 -40No.PF-OMS0001CN-A d.

LEKF-OMZ0035

AC servo motor Motor typeV*) Model LEKFS25V6 LEKFS32V7 LEKFS40V8 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Axial side mounting Lateral mounting Vertical mounting Axial side mounting Axial side mounting Model A C B D MHR2MHR3MDHR2MDHR3Lateral mounting A Lateral mounting A Lateral mounting B Vertical mounting C Vertical mounting D Vertical mounting C Vertical mounting D Auto switch installation groove Lateral mounting B MHR with auto switch MDHR With auto switch Vertical mounting Axial side mounting

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

VZS

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306.

OMR0032

There is a raised part on the controller side. (2) Dimensions Actuator side Controller side Protruding part 86 - 15.4 Controller setting cable (1) How to Order L E C W 2 A C Communication cable L E C W 2 U USB cable PC Communication cable (LEC-W2A-C) USB cable (LEC-W2-U) Controller configuration software USB driver Download from SMCs website https://www.smcworld.com (2) Operating environment

ZSE30A(F)/ISE30A

Analog Output ISE35 Voltage output Current output A B C Range For vacuum pressure Rated pressure range PSE 0 0.0 to 101.0 kPa 101 kPa 5 20 Analog output [mA] Analog output [V] IS For compound pressure 100.0 to 100.0 kPa 100 kPa 100 kPa For positive pressure ISG 0.100 to 1.000 MPa 0.1 MPa 0 1 MPa ZSM1 1 0.6 4 2.4 B A C B A C Pressure Pressure Functions (Refer to pages 41 and 42 for details

Low Differential Pressure Sensor

to 500 kPa 50 to 500 kPa A sensor may be unconnected or mis-wired.