Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Component Parts No. q w e r t Description

VCA

S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

VDW Series

S = 5.0 600 500 400 300 200 100 VDW304 S = 8.0 900 800 700 600 500 400 300 200 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 300l/min (ANR) for orifice 2.3 (VDW20) is P1 approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

MXS

(MPa) X Piston area (mm2) CY1 Weight (Unit: g) MY1 Standard stroke (mm) Extra for options Extension shock absorber Retraction shock absorber Model Axial piping S: Stroke (mm) End lock Buffer Extension adjuster Retraction adjuster 20 30 40 50 75 100 125 150 10 MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 100 115 155 180 80 10 5 30 13+0.15S 160 190 235 285 150 35 15 45 9 40 40 415 26+0.17S 340 340 400

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

RB/RBL/RBQ

Selection of applicable model 78.5 94.2 110 173 188 236 393 Selection of applicable model According to Data D , the tentatively selected RB2015 satisfies Me = 260 kg < 400 kg at = 0.3. Ultimately, it will result in an operating frequency of n20 < 25, without causing a problem.

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

Angle Seat Valve

200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

In-line Air Filter

500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

Magnetically Coupled Rodless Cylinder: Basic Type Series CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40, ø50, ø63

, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

Ionizer IZS40/41/42 Series

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Bore size (mm) Standard stroke (mm) Note 1) Long stroke (mm) Note 2) Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

32 1000 Outside of cylinder tube with hard chrome plated 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 Auto switch rails on both side faces (with 2 pcs.) 1500 Made to Order Specifications Click here for details 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 40 1500 Symbol Specifications -XB9 -XB13 -XB22 Low speed cylinder (15 to 50 mm/s) Note) Intermediate

FHM

500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Ionizer Series IZS40/41/42

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series ø 25, ø 32, ø 40

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer