VEX1

VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

Cylinder with Lock Series CLS

Unlocked condition (when air is supplied.) 788 Double Acting, Single Rod Series CLS Cylinder with Lock Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !

CLS

1 !2 !3 !4 !5 !

Sensor Monitor

(example: If the Pressure switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5 (V) x 1 (M)/(1 (k) + 1 (M)) 4.995 (V), and there is an error of approximate 0.005 V). Output impedance Operation mode Either hysteresis mode or window comparator mode can be selected.

IDU/IDF

595 B IDF8D-1 69 55 14 G D 65 (F) C 462 490 E 4-13 H 645 IDF11C-1 Base integrated with transformer 462 490 695 427 557 IDF15C-1 IDF-TB2 53 438 466 IDU4D-1 681 Transformer IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Part No.

Series AP500

2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

Cylinder with Lock

1 !5 !6 @5 #9 #1 $4 #0 #2 B A #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 @2 w @7 #5 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

E-MY2B_E_A

General 3 positions 5 positions General 15 Setting (continue) 1.Stroke adjustment General 3 positions 5 positions General Adjust the stroke of actuating part. 1-1 Loosen fixing bolt, move the unit to the position where required stroke is obtained and fix the unit by the bolt. 1-2 Loosen lock nut for adjusting bolt for fine setting of stroke by the bolt.

CNG

Brake spring Taper ring Ball retainer Brake shoe holder Air pressure supply Air pressure exhaust Brake shoe Release piston Steel ball Locked state Unlocked state 9-5-10 11 Series CNG Cylinder with Lock Double Acting, Single Rod Construction #7 e$4!2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

PFxx-OMY0005

R Current read value For example, when the display value is 1.000 [MPa], 5%R.D. is 5% of 1.000 [MPa], which becomes 0.05 [MPa]. When the display value is 0.800 [MPa], 5%R.D. is 5% of 0.800 [MPa], which becomes 0.04 [MPa]. R.D. The flow range within which the product will meet all published specifications.

EXxx-OMU0020EN

Valve diagnostics 1 Table. 5-4 Valve diagnostics 1 Bit Description Explanation 0 Valve 0, 1 diagnostics 0: No error, 1: Short circuit 1 Valve 2, 3 diagnostics 0: No error, 1: Short circuit 2 Valve 4, 5 diagnostics 0: No error, 1: Short circuit 3 Valve 6, 7 diagnostics 0: No error, 1: Short circuit 4 Valve 8, 9 diagnostics 0: No error, 1: Short circuit 5 Valve 10, 11 diagnostics 0: No error

Speed Controller with One-touch Fitting

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 dm3/(sbar) Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

E-MY2_E_D

General 3 positions 5 positions General 15 Setting (continue) 1.Stroke adjustment General 3 positions 5 positions General Adjust the stroke of actuating part. 1-1 Loosen fixing bolt, move the unit to the position where required stroke is obtained and fix the unit by the bolt. 1-2 E-MY2C/H Loosen lock nut for adjusting bolt for fine setting of stroke by the bolt.

SI Unit for Vacuum Manifold

Table. 5-13 Input data of Unit status module Bit Content Description 0 PWR diagnostics 0: Power supply for logic/sensors (PWR) is present. 1: Power supply for logic/sensors (PWR) is low. (< approx. 18 VDC) 1 Pressure sensor(s) short circuit 0: No pressure sensors have a short circuit. 1: At least one pressure sensor has a short circuit. 2 Valve-coil(s) short circuit 0: No valve coils have

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

E-P HYREG ® Series VY1

-6 A 1 1 1 1 0 2.5 5 7.5 10 V 0 2.5 5 7.5 10 V 0 2.5 5 7.5 10 V VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa

Mechanically Jointed Rodless Cylinder Series MY2

1.4a = 420 mm/s) = 42.9 (Nm) M3E 1 3 1 3 M3E = x FE x Y = x 309.7 x 53.6 x 10-3 = 5.53 (Nm) Load factor 5 = M3E/M3E max = 5.53/42.9 = 0.13 FE Y M3 6 Sum and Examination of Guide Load Factors = 1 + 2 + 3 + 4 + 5 = 0.57 1 The above calculation is within the allowable value and the selected model can be used.

Prevents Micro-Bubbles

Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment