Body Size: 30, Thread: F (G), Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: Standard, Semi-Standard 2: Standard, Made to Order: X2141 (w/Element Service Indicator)

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: 6C (w/Bowl Guard, Nylon Bowl), Semi-Standard 2: Standard

Body Size: 30, Thread: F (G), Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Standard

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: 1N (1 + N)

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Option: B (Assembly of a Bracket and Set Nuts), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P = 17.5 9 18 P = 17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A P = 17.5 21 (Pitch) L2 L1 5 + 13.8 15.2 + (4.9) 5.4 7.2 68.2 100.3 [102.5] (For mounting) 4 x 4.5 27.8 20 139.6 [144] 127 [131.4] 20 20 37.7 66.8 P EB EA B B B B B 100.6 A A

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-Y69l D-Y7P D-Y7PV D-Y7lW D-Y7lWV D-Y7BA D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5

High Purity Fluoropolymer

A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Micro Mechanical Valve Series VM1000

1.5 R port (3 port only) Symbol 2 port (A) 2 12 10 1 (P) 44 25.4 17 (A) 2 3 port 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 14 8.5 12 10 1 (P) 3 (R) Panel mounting hole * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Max. 6 Push button (Extended) VM122-M5-32 (R, B, G, Y) A VM132-M5-32 (R, B, G, Y) A 23 38 T.T. 3 1.5 1.5 (75.6) (52.1) 23.5 22.1 30 10.5 R port (3 port only) Symbol 2 port (A) 2

AC

equipped with a limit indicator on which the prescribed pressure range can be viewed at a glance.

CL

a guide, use a solenoid valve with a large effective area for the unlocking solenoid.

Tamper Proof and Flat Head Screw

39.7 43.7 32.6 56.2 19 9.5 47.7 R 3/8 23 53.7 1.5 AS331F-03-10ST AS331F-N03-07ST 53.5 21 32.6 1/4" 13.2 17 18.5 43.7 10 38.7 25.6 46.1 20.6 12.9 23 16.2 AS331F-03-12ST AS331F-N03-09ST 22 NPT3/8 19 9.5 53.7 5/16" 15.2 23 1.5 47.7 18.5 20.9 44.9 55.3 34.4 12 39.7 28.2 49.1 AS331F-N03-11ST AS431F-04-10ST 16.2 21 3/8" 17.9 23 49.4 16.2 21 25.8 58 10 32.6 18.5 43.7 32.6 53.5 R 1/2 24 12 55.8

CJ2

2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W Bore size (mm) Hs 17 20.5 Hs 19.5 23 Hs 20 23.5 Hs 16.5 19.5 Hs 17.5 20.5 Hs 23.5 26.5 Hs 20 23 Hs 23 26

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

23 23 23 27 Refer to page 375 for dimensions with connector cable. 316 5 Port Solenoid Valve 10-SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): 10-SYJ5223-M5 Built-in One-touch fitting: 10-SYJ5223G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43 3.5 11 5 B A B A Manual override 19 10 10.6 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) One-touch

CQ2

B A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

SV

With External Pilot Specifications (Pitch) SV 22.3 P = 10.5 13.5 59.6 18.1 8.4 12.6 10 SZ 28.6 23 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 59 SY 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 One-touch fitting PE PE X X SYJ One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" [1(P), 3/5(E) port] Applicable tubing O.D.:

Table of Contents

Calibration is easy with auto-preset function. 4 Installation of a group of sensors as a manifold style at the same site 3 Adsorption confirmation of a workpiece absorbed with water/oil Series ZSE50 Series PSE54 16-3-23 16-2-28 Adoption of a stainless diaphram enables to detect, even though water or oil is adhered to a workpiece and then made ingress to the sensing part.

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.