CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

(see Figure 2) Straight line Mounting pitch A Figure 1 Recommended piping Unit: mm Tubing size Mounting pitch A Straight-line pipe length 4, 5/32" 6 1/4" 8, 5/16" 10 3/8" 12 Nylon tube Soft nylon tube Polyurethane tube 56 or more 84 or more 89 or more 112 or more 140 or more 134 or more 168 or more 30 or more 39 or more 56 or more 58 or more 70 or more 76 or more 82 or more 20 or more 30

Large Size Vacuum Module: Series ZR

ZX L SET H ZR 59.5 ZM ZMA ZQ 109 (Port exhaust) 114 (With built-in silencer) ZH 1 ZU 1 ZL ZY ZF ZP SP ZCUK 18 20 ZR1 -D AMJ AMV For port exhaust 7.2 1 Exhaust (EXH.) port Rc 1/4 AEP HEP S S Related Equipment 75 Digital pressure switch for vacuum Attachment D 109 1 (Port exhaust) 114 1 (Built-in silencer) (75.8) 56 P PD 3 100 (2000) Filter block D Dimensions not indicated are identical to

Parallel Style Air Gripper: Wide Type Series MHL2

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30

Parallel Style Air Gripper Series MHZ

56 29 0.02 42H9 depth4 +0.062 0 0 0.5 +2.7 0 49 (62) 36 When closed 30 32 15 83 (96) 48 0.1 139 (152) 2 x M8 x 1.25 thread depth 17 Note) Through-hole mounting is not possible when using the auto switch at the square groove.

ITV

pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR Flat bracket (Option) M8 x 1 Cable connection thread 56

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

ISG

Hysteresis adjusting bolt 75 110 175 Ex.)1S2761 Bellows assembly for 103L1 1S2761 Light and top cover assembly for 103L1 18 8.5 When replacing other parts, please contact SMC for repair, since it cannot be repaired by user. 2.3 56 3-6.3 23 20 32 10 29 10 26 79 99 126 R 3/8 16-9-8

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max. 20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375 737.5 337.5 700 300 662.5 261.5 625 225 587.5 187.5 562.5

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Left Right VAC. port Common EXH port 2-Rc 1/2, 3/4 (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 4 76 1.5 88 1.5 104 1.5 5 92 1.5 104 1.5 120 1.5 6 108 2.0 120 2.0 136 2.0 7 124 2.0 136 2.0 152 2.0 8 140 2.0 152 2.0 168 2.0 9 156 2.0 168 2.0 184 2.0 10 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 172 2.0 184 2.0 200 2.0 L2 L3 13-4-15 15 Series ZM Manifold

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 Common SUP. port Common pilot EXH. port 2-M5 x 0.8 Rc 1/8 Individual SUP. port Left Right VAC. port 2-Rc 1/2, 3/4 Common EXH. port (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 4 76 1.5

PF2D

1 q t i 385 PF2D Series Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A 4 x 4.5 52 1 18 PF2D540-19 Internal Circuits and Wiring Examples 78 86 186 -1/2 Analog voltage output Analog current output 56 15 Sensor Monitor PF2D3 Black Output for PF2D3 4 8 Switch output Main circuit Main circuit Main circuit Main circuit 3 7 U DC

Valve Single Unit

SX7000 SY7000-11-11 1-6-56 Base Mounted Series SX3000/5000/7000 SX7000: SS5X7-42Stations -02/C10 Grommet (G) 2-M5 x 0.8 (Pilot EXH port) Manual override (Press and turn for the locking type.) A: Orange B: Green (Light/Surge voltage suppressor) Manual override G: 300 H: 600 (Lead wire length) (Press and turn for the locking type.)

VCW

Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions