3

Note 2) Cable O.D.: 6 to 12 mm Note 3) For an outside cable diameter of 9 to 12 mm, remove the internal parts of the rubber seal before using. Assembly 1. Insert the cable into the conduit terminal. 2.

MXH Series Compact Slide

Vertical Horizontal l: Load eccentricity m Mounting position m L L to 100 to 300 Maximum speed mm/s to 500 to 100 to 300 to 500 Load eccentricity lmm 100 50 200 100 50 200 100 50 200 1 2 3 4 5 6 7 8 9 10 11 12 Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also be a diagonal direction .

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Precision Regulator

350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0

IR1000/2000/3000

Recommended proper torque Nm (kgfcm) 1/8 1/4 3/8 1/2 Connection thread 7 to 9 (70 to 90) 12 to 14 (120 to 140) 22 to 24 (220 to 240) 28 to 30 (280 to 300) Winding direction Torque Expose approx. 2 threads Pipe tape Operating Environment Warning 1.

AMD

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

33

12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

/301 Pulse output (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output Voltage output Note 5) 1 to 5 V Analog Linearity: 2% F.S. or less, allowable load resistance: 100 k or more specifications output Current output Note 6) 4 to 20 mA Linearity: 2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC Power supply voltage

Regulator for 2 MPa ARX 20

400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics

VH Series, 4 Way Hand Valve

VH31 -N02/N03 Scale: 40% 4 (B) 2 (A) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 74 62 62 49 2 (A) 49 45.5 46.6 62 134 97 125 94 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-1/4,3/8NPT 12 4-1/4NPT VH33 -N02/N03 (Bottom porting) 2 (A) Panel cut dimension 44 2A +0.3 0 1 (P) 3 (R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

PSxx-OMU0008CN

12 V 300 24 V 600 DC(-) 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -23No.PS-OMU0008CN-D [] 3 0.2 [] / / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (63 ) (3 ) () () (26 ) (28 ) (30 ) 3 () 3 -24No.PS-OMU0008CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20C [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [

Refrigerated Air Dryer

Symbol 313 314 315 10 12 Accessory (Option) Separately Installed Transformer/Dimensions IDF-TR500-1 A C OUT PUT B IN PUT E D 4-F Input cord 2 m Transformer part no.

Lightweight and Compact

No anchor bolt is included. 77 A HRS090 Series Standard Type Cooling Capacity HRS090-A-20/40 (50 Hz) HRS090-A-20/40 (60 Hz) 12 12 10 10 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C Ambient temperature 40C 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

I/O Configurator (NFC version)

LED in pairing mode (Wireless Base) -105No.EX-OMV0017-C (12) Click the Refresh button to update the information in the setting tab window.

I/O Configurator (NFC version)

LED in pairing mode (wireless master) -104No.EX-OMV0017-B (12) Click the Refresh button to update the information in the setting tab window.