Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder -: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700
-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700
Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.
11 [Mounting screws set made of stainless steel] Since this is a guideline including hysteresis, not meant to be guaranteed.
Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4
CONTENTS SAFETY 2 General General 3 positions 5 positions Model Indication Method 5 Names and Functions of Individual Parts 6 Installation 9 3 positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 5 positions Names and Functions of Controller 23 Example of Internal Circuit and Wiring 24 Setting 27
Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13
-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.
For details, refer to page 8-30-32. 8-20-11
11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?
Inch size Metric size 04 06 08 10 12 01 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 With One-touch fitting AS M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 ASP 01 02 03 04 ASN U10/32 N01 N02 N03 N04 AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230F ASD330F ASD430F 100 200 400 1.5 3 6 Effective area (mm2) Effective area
400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (
Manifold weight general formula=0.43n+0.49 (kg) VQC Individual EXH SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-11 VS7-6 Manifold/Dimensions F. R.
Monitor and Test Mode of the Controller . 51 11. Operation . 53 11.1 Return to origin position . 53 11.2 Positioning operation . 55 11.3.
0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80 40 115 + Stroke 60 + Stroke 0.05 35.8 36 1 View A-A 40 0.1 19.8 80 (Max
Note 2) For the specifying way of ordering numbers for the solenoid valve with adapter assembly, refer to page 10-16-4. 10-16-19 20 Series MVGQ Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 16 100 12 20 25 32 40 50 63 80 D-Z7/Z8 8.5 14 7.5 9.5 9.5 11 11 11 13 13 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 11.5 5 6 6.5 8.5 8.5 9 10
, 300, 400 Panel mount All models applicable Different P port location (On handle side) Note that 1(P) port of VH600 is located on handle side as standard.
-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is
3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100
LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel