Low Friction Cylinders Series MQ

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.

SI unit for EtherNet/IP TM

Installation example n,m L 0 1 2 3 4 5 6 7 8 9 10 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 n,m L 11 12 13 14 15 16 L1 160.5 171 181.5 192 202.5 213 L2 [mm] : L1 shows the dimensions of the VQC1000 series solenoid valve.

Process Pump

2 12 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount

Digital Flow Switch

Input time 30 ms or longer Reference condition*11 Select from Standard condition or Normal condition.

VS7-6

Manifold weight general formula=0.43n+0.49 (kg) VQC Individual EXH SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-11 VS7-6 Manifold/Dimensions F. R.

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16

Sine Rodless Cylinder Series REBR Direct Mount Type

0.7MPa Maximum operating pressure 0.18MPa Minimum operating pressure 10 to 60C Ambient and fluid temperature 50 to 600mm/s Piston speed Non-lube Lubrication 0 to 250st: +1.0, 251 to 1000st: +1.4, 1001st and up: +1.8 Stroke length tolerance 0 0 0 Direct mount type Mounting Standard Strokes Maximum stroke with switch (mm) Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 150

Shot Pin Cylinder

0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80 40 115 + Stroke 60 + Stroke 0.05 35.8 36 1 View A-A 40 0.1 19.8 80 (Max

IZx-OMX0087

Controller 1)IZTC41 For IZTC41-L, refer to the IO-Link dedicated instruction manual. 1 2 3 4 5 6 14 7 8 13 12 10 9 11 Table4. Name of parts No.

Process Valve Series VNA

(mm) Symbol 3 2 1 Port size Rc 100 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note 2) Note) Note 2) 4 5 6 7 9 Other A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 24 VDC 12 VDC 7 Note 2) Valve size 1 to 4 Note 2) 240 VAC 50/60 Hz 11 15 11 10A 3 8 Note 2) B:

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

76

temperature: 113F (45C) RoHS How to Order IDF 30 100 FS Nil C K P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

High Vacuum L Type Valve

XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

M5 x 0.8 (Finger opening port) D3 O 20S 13 3 23 7 M5 x 0.8 (Finger closing port) 4 2 MHY2-10D2 Opening/Closing direction through-hole type 4-3.4 (Hole for mounting attachment) 6 0.005 0.025 3 6 12 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 12-10-11 11 Series MHY2 Dimensions MHY2

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

M5 x 0.8 (Finger opening port) D3 O 20S 13 3 23 7 M5 x 0.8 (Finger closing port) 4 2 MHY2-10D2 Opening/Closing direction through-hole type 4-3.4 (Hole for mounting attachment) 6 0.005 0.025 3 6 12 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 12-10-11 11 Series MHY2 Dimensions MHY2

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Note 11) Refer to Straight Piping Length and Accuracy on page 4 for details.

High Vacuum L Type Valve

XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

High Vacuum L Type Valve

11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.