2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-32D MHS2-32D 150 150 Pressure 0.6MPa Pressure 0.6MPa 120 120 0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 90 90 0.3MPa 0.3MPa 60 60 0.2MPa 0.2MPa F 30 30 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L mm Gripping point L mm MHS2-40D MHS2-40D 250 250 Pressure 0.6MPa Pressure 0.6MPa 200 200 External gripping

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Compact Cylinder

Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123 1.0 12 50 127 137 147 157 167 177 187

Modular Type Lubricators Series AL

268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50 50 70 70 N 27 40 54 54 66 66 Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications With barb fitting Metal bowl

CE

11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

03 J B Options Body size Accessories (Options) Drain guide 1/4B female thread INOUT reversal Element service indicator None 150 250 350 450 550 650 850 J R 1/4 1/8 Description Symbol T 3/8 1/2 3/4 1 11/2 B Bracket N.C. auto drain C N.O. auto drain D Refer to the table below for accessory/ option combinations.

AMG

guide 1/4B female thread R IN-OUT reverse direction 1/8 1/4 3/8 1/2 3/4 1 150 250 350 450 550 650 850 11/2 Removed rate of water % = HA Removed water (Water droplet) g x 100 Accessories (Options) Inflowed water (Water droplet) g Symbol Description No accessories Bracket AT Various equipment for drain discharge B IDl Thread N.C. auto drain C Rc (PT) N.O. auto drain D AMG F G(PF) N NPT Please

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Symbol Order Made P.4.6-21 4.6-15 Micro Mist Separator with Prefilter Series AMH AMH150 to AMH850 How to Order AMH 250 03 J B Body size Options J Drain guide 1/4B female thread R IN/OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Description None Bracket Symbol T Element service indicator B N.C.auto drain C N.O.auto drain D Note) Refer to p.4.7-7

MHL2

40 40 0.3MPa 0.2MPa 40 40 0.2MPa 0.2MPa 0.2MPa 20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250

VXA21/22

6 170 Construction/Components 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 0.61 4.5 11 1 4 250 Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Process Pump

2 12 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount

Lubricator Series AL10 to 60

268 D 25 40 53 70 70 90 95 G 27 40 54 54 66 66 E 47 47 C 26 36 38 40 38 41 45 H 22 23 26 25 35 35 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl

Modular Type Lubricator Series AL

268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

6.5 31 129 4 30 130 4 57 153 61 149 60 150 11 8.5 8.5 90.2 239.8 94.2 235.8 93.2 236.8 Auto Switch Mounting When mounting an auto switch, insert it into the cylinder's switch groove from the direction shown in the drawing to the right.

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Digital Gap Checker

N None 1 2 n T 7 Digital Gap Checker With Control Unit ISA3 Series 3-Color Display RoHS How to Order G C N M B 2 ISA3 L 1 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm 2 port solenoid valve Rated voltage Piping specifications Output specifications Nil 24 VDC 1 *11 100 VAC 2 *11 110 VAC *11: Made to Order N NPN output P PNP output Supply side Detection side Unit

Digital Flow Switch (Manifold type)

(The value will be 7 s for the temperature sensor output.) 7: When the temperature sensor is used, it will be 250 VAC. 8: The Device ID varies depending on the product No.

K35-OMX0029

Faster Average speed [mm/s] Measuring conditions Supply pressure: 0.55 MPa 0 50 100 150 125-250 160-300 Bore size-Stroke 200-300 250-450 320-530 Speed adjustment rotary switch set value 0 5 9 Mounting: Vertical downward Load: no-load Operating direction: Upward *1 The average speed value is the stroke divided by the full stroke time.

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

IIIIIII

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.