SMC

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Compact Cylinder with Solenoid Valve/

speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 7 Fully opened 0 0 1 2 3 4 5 6 7 8 9 10 Without restrictor Without restrictor Number of restrictors needle rotations Fully opened Number of restrictors needle rotations Restrictor: ASN2-M5 Pressure: 0.5 MPa Mounting orientation: Horizontal, No-load, Piston extended The above piston speed

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

Pin Clamp Cylinder Series CKQ/CLKQ

Mounting tap: M10 x 1.5 Pin diameter: 10H7 Nil S No shim With 2 mm shims C Port b side a side ( side) b side ( side) a side Port : Mounting tap : Pin diameter : Mounting tap : Pin diameter D Clamp arm b side S 66 b side Mounting tap E The positions of the mounting taps and pin holes are different depending on the body shape. Refer to Body shapes and positions of mounting sides.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

m/s Note) Note 1) Available with up to 16 solenoids.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

to 16 stations: W = 26n + 199 Note 3) SX3000 Weight W (g) n: Stations Lubrication Not required Unrestricted 150/30 Dust proof 2 to 10 stations : W = 54n + 227 11 to 16 stations: W = 54n + 264 SX5000 Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

AS Type adjustable by flat head screwdriver Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Inch size Metric size 1/4 standard 3.2 3/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 1/2 standard 5/32" 4 3/16" 6 1/4" 8 With One-touch fittings 5/16" 10 3/8" 12 1/2" Use 1/8" tube. 15-9-81 8 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

+ Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

11 8 8 9 16.5 20.5 11 O S 39 19 K (58) 15 25 19 19 9 4 4 9 25 When open F 13 13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70 H 144 216 256 G 114 186 226 F 84 126 146 E 28 58 78 D 76 106 126 B C 45 75 95 A MHL2-16D MHL2-16D1 MHL2-16D2 112211221122114 168 208 40 70 90 929 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions MHL2-20D 11222 x 6.6

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Multistage Ejector (N)ZL Series

Note 2) Since surge voltage is prevented by a rectifier in the case of AC, there is no "S" type.

VP300/500/700

S070 Nil Standard (Internal pilot) R External pilot Manual override VQ Option Light/Surge voltage suppressor Nil Push type Rated voltage B Locking type (Slotted) Nil None VKF 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz C Locking type (Manual) With light/surge voltage suppressor (Type E, T, D, or Y only) Z Option VQZ 110 to 120 VAC, 50/60 Hz S With surge voltage suppressor (Type G only) 4

Coolant Valve

Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

Digital Flow Switch Series PFA For Air Series PFW For Water

in X, Y, Z directions, 2 hours each 490m/s in X, Y, Z directions, 3 times each 290g (without lead wire) 250g (without lead wire) Equivalent to IP65 3/8 1/2 1/8, 1/4 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.