2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

ISO Cylinder

15 45 45 + 45 (n 2) (n = 2, 4, 6) 10 15 45 45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 60 44 18 45 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14 x 1.5 30 22 1/4 17 50 25 9 73 73 53 20 50 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 21 80 32 8 100 100 75 28 65 32 13 12 130 75 155 22 20 15

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

High Purity Chemical Valve

19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table

VQZ1000/2000/3000

part number consists of 10 units.

LVQ

7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

0.4

10 pieces.

REA/REB

Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 130 11 60 100 10 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 120 160 70 9.2 12 11.5 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25 47.5 17 M10 x 1.5 190 10.5 90 140 12 15 136 9.2 Rc 1/4 M10 x 1.5 M8 x 1.25 M20 x 1.5 14 56 PA dimensions are for split from center.

REA/REB

x 1.0 M6 x 1.0 M10 x 1.0 10 31 130 7 10 11 60 100 86 10 M14 x 1.5 Rc 1/8 M6 x 1.0 39 10 M8 x 1.25 11.5 120 160 12 70 15 100 9.2 Rc 1/8 M10 x 1.5 M8 x 1.25 M20 x 1.5 17 47.5 190 9.2 12 10.5 90 140 136 15 M20 x 1.5 Rc 1/4 M8 x 1.25 56 14 M10 x 1.5 PA dimensions are for split from center.

CM2

Minimum Strokes for Auto Switches Mounting (mm) Number of switches 2 n Auto switch model On the same surface On different surfaces On the same surface 1 On different surfaces D-C7 D-C8 D-H7l D-H7lW D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50+45(n2) 50 15 n2 2 15+45 ( ) (n=2, 4, 6) 10 60+45(n2) 60 15 n2 2 15+50 ( ) 10 65 15 (n=2, 4, 6) 65+50(n2) n2 2 20+50 ( ) (n=2, 4, 6) D-H7LF 10 65 20 D-B5

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage 20 to 60 Ambient temperature (C) Fluid temperature (C) 10 Note) to 60 Seal material Leakage rate (Air) Note 1) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 15 cm3/min or less (AIuminum body type) 15 cm3/min or less (Resin body type) 2 cm3/min or less (Metal body type) 10 cm3/min or less Note) Dew point temperature: 10C

VZ100/300/500

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz

Rotary Actuator

Applicable shaft types: J, T X = Y = X = Y = Y = X = Y = Y = [mm] [mm] [mm] Size X Y 30 3 to 13 3 to 10 50 3.5 to 27 1 to 20 63 3.5 to 29 1 to 22 80 4 to 38 1 to 25 100 5 to 44 1 to 30 Size X Y 30 3 to 25 3 to 10 50 3.5 to 36 1 to 20 63 3.5 to 41 1 to 22 80 4 to 50 1 to 25 100 5 to 60 1 to 30 Size Y 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A59 Note) Except flange type The rotation

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

MGG

32Stroke Stroke Stroke 1.2 2.2 2 (Slide bearing type) (Slide bearing type) (Slide bearing type) 2 1 1.5 500st 400st Deflection Y (mm) 600st Deflection Y (mm) 1.5 Deflection Y (mm) st: Stroke (mm) st: Stroke (mm) st: Stroke (mm) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70