5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Digital Flow Switches

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

Fieldbus System

End Plate Model EX600-ED2-l EX600-ED3-l Power specifications Power connector M12 (5-pin) plug 7/8 inch (5-pin) plug Power supply (for Control/Input) 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 170 g 175 g EX600-ED3-l EX600-ED2-l Handheld

2/3 Port Valve

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Air Slide Table Series MXP

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Area: (800) 258-9200-www.stevenengineering.com 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20

Microspeed Cylinder

(0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

42

Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Fieldbus system Analog unit

5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB -21No.EX-OMN0038-C (2)Signed binary data format and twos complement data format Input signal range: 0 to 10 V

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Electric Actuator Miniature Rod Type Miniature Slide table Type

25mm CCW CW 0 5 10 15 20 25 Stroke [mm] Origin 25mm CCW CW 10 15 20 25 30 35 Stroke [mm] Origin 25mm CCW CW -25 -20 -15 -10 -5 0 Stroke [mm] Origin 25mm CCW CW -15 -10 -5 0 5 10 Stroke [mm] Origin 25mm CCW CW -35 -30 -25 -20 -15 -10 Stroke [mm] 31 - Initial setting for the ORIG parameters Refer to the controllers (LEC series) operation manual for detail.

LG1H

Not required. m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 58 for deflection data. 48 Standard Motor/Horizontal Mount Specification Series LG1H21 With Coupling Dimensions/LG1H21PA 110 4 x M6 x 1 thread depth 10 67 20 0.02 4 x M8 x 1.25 thread depth 10 8H10 depth 10 8H10 depth 8 160 (123.5) Stroke + 180 (table movement range) 82.5 10 107 95 Work piece mounting reference plane 55 Body

VQ7-6/7-8

Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

VQ7-6/7-8

seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

High Purity Chemical Valve

1/4, 3/8 LVC4m 10 10, 12 3/8, 1/2 LVC5m 16 12, 19 1/2, 3/4 LVC6m 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.