1

B -X51 MXP6 Standard product 2.4 2.4 Z 2-plugs: M-3P -X23 (mm) Z 2-hexagon socket set screws: M3 A 20 20 25 B 10.5 9 12 C 8 9 10 D 4.5 5 6 Model MXP10--X51 MXP12--X51 MXP16--X51 (mm) Z 45 60 Model MXP6-5-X23 MXP6-10-X23 MXP10/12/16 Standard products 2-plugs: M-5P 3 3 Z -X23 Z 2-hexagon socket set screws: M5 x 4 (mm) Z 60 90 76 106 102 128 Model MXP10-10-X23 MXP10-20-X23 MXP12-15-X23 MXP12

V100

L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14

Mechanically Jointed Rodless Cylinder Series MY1

35 168 274 100 220 50 17.5 (mm) Model PL QE S Z RR SS TT UU YH YW MY1HT50 180 384 6 414 23.5 10 103.5 57 136.4 253 MY1HT63 200 439 10 474 29 13.5 108 71.5 162.6 273 D-X Individual -X Technical data 1049 Series MY1HT Side Support Side support A MY-S63A 2 x 17.5 10.5 18.3 18.3 2 x 11.5 A B 70 100 Side support B MY-S63B 2 x M12 x 1.75 70 100 A B Dimensions (mm) Model A Applicable bore size

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

LVQ

S) TL/TIL SMC LQ3 C A B SMC B A SMC D U (Max. T) Z (H) View Z LVQm0-S shown.

Air Cylinder

Clevis (mm) Bore size Stroke range B CD CZ L RR TE TF TH TT TV TW TX TY TZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Z ZZ Z ZZ Z ZZ Z ZZ 20 Up to 125 38 8 29 14 11 10 5.5 25 3.2 (35.8) 42 16 28 43.4 143 164 168 189 193 214 25 Up to 200 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) 42 20 28 48 150 171 175 196 200 221 225 246 32 Up to 200 54 12 40 20 15 10 6.6 35 4.5 (49.4) 48 22 28 59.4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

Hydraulic

(mm) With rod boot Stroke range (mm) Bore size (mm) l e CD J B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 21.5 15 52 25 to 1400 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 12 15 52 52 25 to 1400 1/3.5 stroke 50 M10 x 1.25 76 145 52 10 27

NCG/CG1

(mm) B CD CZ L RR TE TF H TT TV 20 25 32 40 38 8 29 14 11 10 5.5 25 3.2 (35.8) Up to 125 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) Up to 200 54 12 40 20 15 10 6.6 35 4.5 (49.4) Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) Up to 200 Z 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TX TV TW TX TY TZ ZZ + Stroke Z + Stroke Z ZZ Z ZZ Z ZZ ZZ TF+0.10 0 TZ 20 25 32 40 42 16

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

CJ2

Bore size B C d H 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A NTJ-015A 10 16 (mm) Bore 10 16 C GA GB H KA LD A B MM NA NB L LH LX X Y S Z LB 3.5, 6.5Depth of counter bore: 4 14 16 5 20 4.2 15 12 M4 X 0.7 20.5 9.5 23 8 12 28 8 54 74 16 4.5, 8Depth of counter bore: 5 20 16 5 20 5.2 15 18 M5 X 0.8 20.5 9.5 26 10 16 28 8 55 75 20 Bottom mounting CJ2RKA10 SCJ210, #10 CJ2RKA16 SCJ216, #10 The

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

tube O.D.: 8 10 12 1 P 1 P B 2 B 2 B 2 B 2 B 2 VQZ The air outlet and external pilot locations for the built-in silencer type are on the B side (both sides) . + + When P/R ports are designated as B, P/R ports on both sides are open.

Air Cylinder Series MB

Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22 24 7 7 8 8 10 10 14

CA2

600 up to 600 up to 750 up to 750 CS1 B H1 K KA C J D E F G H MM N P TT TZ S S TX TY Z Z ZZ 150 164 172 204 216 A AL B1 ZZ 140 154 162 194 206 0.032 0.059 0.032 0.059 0.032 0.059 0.040 0.073 0.040 0.073 62 74 90 110 130 85 95 110 140 162 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 8 11 11 13 16 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

15

Work load [kg] 2000 1000 800 1500 L9 L9 [mm] L9 [mm] 600 1000 Z m Me 400 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L10 [mm] L10 [mm] 600 1000 Y 400 500 200 m Me 0 0 0 2 8 10 4 6 0 10 15 5 20 Vertical L10 Work load [kg] Work load [kg] 2000 1000 800 1500 L11 [mm] L11 [mm] 600 1000 Z 400 500 200 m Me L11 0 0 2 8 10 4 6 0 0 10 15 5

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 B 56.6 P 1 1 P 30.5 29.1 A 4 A 4 A 4 A 4 A 4 8.7 11.1 12.5 22.7 18 (Pitch) P=16 (10) (14.3) (For DIN rail mounting) (23.3) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.