SMC Corporation of America
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1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved This pamphlet is printed on recycled paper with concern for the global environment. 1st printing GR D-036 P-400(N) Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

specifications p: Combination possible Blank: Combination not possible Applicable model Symbol SMC REGULATOR Specifications tSpacer ITV20mm ITV30mm ITV2000 Approx. 189 Set pressure max. 0.1MPa 1 P P Standard specifications Optional specifications Set pressure max. 0.5MPa 3 P P Approx. 133 Set pressure max. 0.9MPa 5 P P Connection Rc(PT) 1/4 02 P P eL-bracket rT-bracket Connection Rc(PT) 3/8 03

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 1996 D-036 P-98 (M) 2nd printing May, 2001 D-SMC.L.A. P-80 (JT) All specifications in this catalog are subject to change without notice. Printed in Japan.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

vacuum/low pressure T VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03

DC: Can be attached to Grommet, Conduit, Conduit terminal. 220 VAC, 50/60 Hz VG 3 8 03 5 6 24 VDC S T Conduit terminal Without connection port (For manifold) 00 12 VDC TL Terminal with indicator light VP 9 7 240 VAC, 50/60 Hz Other DLDIN terminal with indicator light S070 Option For the coil rated voltage (option ), please contact SMC.

Conduit terminal DIN terminal VQ7 Conduit terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8)

NO BORE SIZE B R NX ND U NO6-40UNF 0.94 0.75 0.39 0.54 0.188 0.188 0.56 NY-J010B 10 (3/8) NO10-32UNF 0.94 0.75 0.39 0.54 0.188 0.188 0.56 NY-J016B 16 (5/8) Note) includes Rod Jam Nut, Clevis Pin and 2 Retaining Rings PART NO BORE SIZE A B C D PART NO BORE SIZE A B C D 0.31 0.11 0.11 5-40UNC JM-005 6 (1/4) 0.44 0.50 0.16 1/4-28UNF JM-025 6 (1/4) 0.31 0.36 0.11 6-40UNF JM-006 10 (3/8) JM-03

Body Size: 40, Backflow: without Backflow Function, Thread: F (G), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa