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7 @0 t e o r !8 !4 !3@1 !2 w !1 Description Component Parts Component Parts Note Description Material No. Material Note No.

Air cylinder

L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

IDX-OM-O004E

2 10 . 4 Maintenance . 10 2 Chapter 11 Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option R 12 . 1 Safety instructions . 12 1 12 . 2 Specifications . 12 1 12 . 3 Power supply connection procedure . 12 1 12 . 4 Cautions for handling

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

AKH/AKB Series

From male thread to female thread Female Thread/Male Thread Combinations A R(PT) thread NPT thread Female thread NPT Male thread NPT Female thread Rc(PT) Male thread R Model Model 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 From female thread to male thread AKB01 AKB02 AKB03 AKB04 AKB01 AKB02 AKB03 AKB04 1/8 1/4 3/8 1/2 1/8 1/4 3/8 1/2 B 2 Check Valve with One-Touch Fitting Series AKH/AKB Specifications

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

S

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 14 Position for application of grease Table 9 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 28 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.14, ) Pay attention to the mounting direction of the seal.

17

pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 5 Note 1) 10 Note 1) 5 10 5 10 D-A9 D-A9V D-M9V 5 Note 1) 5 D-M9 10 Note 1) 10 5 Note 2) D-M9W 10 Note 2) 10 5 Note 2) D-M9WV D-M9AV 10 5 Note 2) D-M9A 10 Note 2) 15 15 D-P3DW Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

10

0 r !1 u w e t y i o !2 No.

AKH/AKB Series Check Valve with One-touch Fitting

From male thread to female thread Female Thread/Male Thread Combinations A R(PT) thread NPT thread Female thread NPT Male thread NPT Female thread Rc(PT) Male thread R Model Model 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 From female thread to male thread AKB01 AKB02 AKB03 AKB04 AKB01 AKB02 AKB03 AKB04 1/8 1/4 3/8 1/2 1/8 1/4 3/8 1/2 B 2 Check Valve with One-Touch Fitting Series AKH/AKB Specifications

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Refrigerated Air Dryer

201 Note 1) 202 203 204 205 Note 1) In the case of option S, model no. will be differed.

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235