FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 3A FMW-4200-X5-10 .2 5 30 .5 .8 10A FMW-4200-X5 .5 5 30 .5 .8 15A FMW-4200-X10 .5 5 30 1.0 1.5 15A FMW-4200-X30 1.5 30 30 2.0 3.0 15A Ordering Information Stocked

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 3A FMW-4200-X5-10 .2 5 30 .5 .8 10A FMW-4200-X5 .5 5 30 .5 .8 15A FMW-4200-X10 .5 5 30 1.0 1.5 15A FMW-4200-X30 1.5 30 30 2.0 3.0 15A Ordering Information Stocked

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 3A FMW-4200-X5-10 .2 5 30 .5 .8 10A FMW-4200-X5 .5 5 30 .5 .8 15A FMW-4200-X10 .5 5 30 1.0 1.5 15A FMW-4200-X30 1.5 30 30 2.0 3.0 15A Ordering Information Stocked

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 3A FMW-4200-X5-10 .2 5 30 .5 .8 10A FMW-4200-X5 .5 5 30 .5 .8 15A FMW-4200-X10 .5 5 30 1.0 1.5 15A FMW-4200-X30 1.5 30 30 2.0 3.0 15A Ordering Information Stocked

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 3A FMW-4200-X5-10 .2 5 30 .5 .8 10A FMW-4200-X5 .5 5 30 .5 .8 15A FMW-4200-X10 .5 5 30 1.0 1.5 15A FMW-4200-X30 1.5 30 30 2.0 3.0 15A Ordering Information Stocked

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3/4 & 1 128 161 59 77 34 74 64 (Max. 73) AVL5000-*06 to 10-*DZM Soft start valve with lock out H Air direction Nil Left to Right F Port thread Body size R Right to Left Nil Rc 20 1/4 N NPT 30 3/8 F G 40 1/2 C E D 50 3/4, 1 Electric entry 1(P) 2(A) Port size Manual lockout Nil 1/4 (AVL2000) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with

Booster Relay Series IL100

62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

PFMB.eng

Flow setting (3 step setting mode) Function setting (Function selection mode) Other functions [1000] 1000 L/min (PFMB7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. [ 10] 10 L/min (PFMB7201) [ 25] 25 L/min (PFMB7501) Do not use the product for flammable fluid. Fire or explosion can result.

MHx-OMM0057

30 70 150 220 2,905 MHL2-32D1 120 198 318 3,820 32 20 MHL2-32D2 160 242 402 4,655 MHL2-40D 30 100 188 288 5,270 MHL2-40D1 160 246 406 6,830 40 20 MHL2-40D2 200 286 486 7,905 ) (mm) 10 16 20 25 32 40 (MPa) 0.15~0.6 0.1~0.6 () -10~60 (mm) 0.1 () (N) 0.5MPa 14 45 74 131 228 396 () 10,16,20,25 40mm 32,40 80mm 4 - 3. 3-1 3-2 3-3 1 ISO VG32 5 - 3-4 Nm mm Nm mm MHL2-10D M4X0.7 1.4 5

ZSP1

Hysteresis 0.5 kPa Internal orifice 0.5 0.8 Supply voltage 12 to 24 VDC (Ripple 10% or less) Output type NPN open collector 30 V, 80 mA Indicator light ON: When output is ON.

Process Pump <Fluororesin Type> Series PA3000

pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT 3/8", 1/2" 8 190 30 14 110 AIR SUP. 84 81 AIR E x H. 67 13 30 26 10 FLUID IN 3/8", 1/2" EXH (P2) Rc, G, NPT, NPTF 1/4

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.

VXZ

Add 10 g for the conduit type, 30 g for the DIN terminal type, and 60 g for the conduit terminal type. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Process Valve

105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 Port size: Flange: 32F, 40F, 50F Standard/Vacuum pilot Applicable cable O.D. 6 to 8 (D, DZ) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) E P2 P1 C I (Grommet: G) J (DIN terminal: D, DZ) VNA H H VNB VNB D B (Air operated