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Flow Rate Range: 150 to 3000 ℓ/min, Port Specification: NPT, Port Size: 1", PF2A703H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: w/o Lead Wire, Unit Specification: Fixed SI Unit

Flow Rate Range: 600 to 12000 ℓ/min, Port Specification: G, Port Size: 2", PF2A712H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: w/o Lead Wire, Unit Specification: Fixed SI Unit

Flow Rate Range: 300 to 6000 ℓ/min, Port Specification: Rc, Port Size: 1 1/2", PF2A706H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: M12 w/3m Lead Wire and Connector, Unit Specification: Fixed SI Unit

Mount an air filter on the supply side to prevent it happening again. 28 - Document No.ZL-OM01001-A Trouble Cause Countermeasures Vacuum failure over time (absorbs properly initially.) Adsorbing part has some problem, such as deterioration of the vacuum pad, or leakage due to frictional wear. Replace the vacuum pad with a new one.

ISE78G-#-L2 Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 12 Mounting and Installation 15 Installation 15 Piping 17 Wiring 19 Outline of Settings [Measurement mode] 22 Pressure Setting 22 3-Step Setting Mode 23 Simple Setting Mode 25 Function Selection Mode 27 Function selection mode 27 Default setting 28

Part number of auto switch mounting bracket 28 Revision history Initial release : 2012/5/21 Revision 1 : 2014/1/30 Add the air cushion. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

(page 22, 28 and 31) -32No.PS-OMW0002-C [F 4] Auto-preset function This function will automatically calculate and set the optimum pressure based on the actual operating condition, when hysteresis mode has been selected. Press the UP or DOWN button in function selection mode to display [F 4]. Press the SET button. Move on to auto-preset function.

L[]ZB[]3 32 52 8e9 10 21 16 L[]ZB[]3 40 55 28.5 20 28 3.2 L[]ZB[]5 55 75 38 23 33 3.2 Model no. A B C D E F Model no. A B C D E T Use 2 spanner flats when fixing the foot to the motor. Recom m ended setscrew: M6 4pcs. 4 Knock pin 2pcs. Use (1)(across flat) when fixing the foot at the rod. L[]ZB[]3 119.5+st 69.7+st 4 6.8 L[]ZB[]5 155.5+st 92.7+st 4 7 Model no.

less 2 m or less Note 4) CN1 Emergency stop EMG 42 Servo ON SON 15 Note 4) CN6 RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit selection 10 VDC Analog monitor 2 2 MO2 LSP 43 Forward rotation stroke end LSN 44 Reverse rotation stroke end 2 m or less DOCOM 47 Upper limit setting P15R 1 Analog torque limit +10 V/Maximum torque TLA 27 LG 28

less 2 m or less Note 4) CN1 Emergency stop EMG 42 Servo ON SON 15 Note 4) CN6 RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit selection 10 VDC Analog monitor 2 2 MO2 LSP 43 Forward rotation stroke end LSN 44 Reverse rotation stroke end 2 m or less DOCOM 47 Upper limit setting P15R 1 Analog torque limit +10 V/Maximum torque TLA 27 LG 28

P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28

.: GR-S-010 (10 g) Scraper NBR Cushion seal Chromated NBR Magnetic shielding plate Clear anodized Rolled steel plate Switch rail 27 Aluminum alloy Magnet 28 Nickel plated Hexagon socket head cap screw 29 #0 Chromium steel Wear ring C Special resin 26 to 29 are non-replaceable parts, so they are not included in the seal kit. 163

Scraper NBR Cushion seal NBR Switch rail gasket NBR Magnetic shielding plate Rolled steel plate/Chromated Switch rail 27 Aluminum alloy/Clear anodized Magnet 28 Hexagon socket head cap screw 29 #0 Chromium steel/Nickel plated Wear ring C Special resin 171

Description Material Part no. 5 Diaphragm assembly Aluminum die-casted/Brass/NBR P218010-1 6 Element Bronze 1301-5B 7 Seal NBR 1301510 DRAIN 8 Filter disk assembly Brass/NBR P218010-16 9 O-ring NBR AS568-228 10 O-ring NBR JISB2401 P4 156 Filter Regulator IW Series Dimensions 15 Panel mounting hole Max. 4 M14 x P1.5 Panel 3.2 BLEED 68 208 60 28 View A OUT SUP 54 46 140 10 Pressure gauge port

temperature 10 to 70C Size Applicable cylinder Nominal thread size 20 For 20 M8 x 1.25 32 For 25 M10 x 1.25 For 32 M10 x 1.25 40 For 40 M14 x 1.5 Dimensions M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E mF G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28

11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

193.2 (When removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28

Abnormal driver parameter 28 A driver parameter abnormality in the controller system has occurred. Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return). No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found.

Cable core wire colors Brown White Blue Black Green/Yellow 1 2 3 4 5 Connections 19 Accessories EX600-W Series u Power Supply Cable with M12 Connector (B-coded) SPEEDCON PCA1564927 Socket specification, Cable length (L) 1564927 Straight 2 m 1564930 Straight 6 m 1564943 Angle 2 m 1564969 Angle 6 m Straight connector type Angle connector type 50 L 36.3 14.8 50 L 44.5 2 1 5 2 1 5 28 5.9 M12