Process Pump

Fluoropolymer Fittings Hyper Fitting/Flare type Series LQ3 Specifications LQ310 LQ320 LQ330 Model Material Max. operating pressure (at 20C) New PFA 1.0 MPa 0 to 150C 0 to 200C 3 to 25 1/8" to 1 1/4" Nut material: PVDF Operating temperature Nut material: PFA Metric Inch Applicable tube size Refer to Best Pneumatics No. 7 for further details.

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Nut Tubing support Insert bushing Tubing Before tightening Seal locations Excellent heat resistance The use of a nut with locking mechanism and trapezoidal screw threads maximizes seal performance even when subjected to heat cycles, maintaining integrity up to 200C.

JXCx-OMU0004

300 2 36 400 18 400 9 400 3 48 500 24 500 12 500 4 60 600 30 600 15 600 5 72 700 36 700 18 700 6 84 800 42 800 21 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A LEYG32A LEY32B

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

IR Series) 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 sliding resistance [MPa] Pressure equivalent to C96SD50-200C Example B Example A Driving roller Winding roller Precision regulator Precision regulator (Moving object) f C96YD50-200C Pressure [MPa] Example B Specifications Precision regulator Made to Order (For details, refer to pages

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Regenerative resistor area Work load [kg] Work load [kg] 30 Lead 10: LEY32B 40 Lead 20: LEY32A 20 Lead 20: LEY32A 20 10 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Speed [mm/s] Speed [mm/s] LEY32DV7 (Motor mounting position: In-line) Vertical Horizontal 60 80 Lead 4: LEY32DC Lead 4: LEY32DC 50 Regenerative resistor area 60 Lead 8: LEY32DB 40 Work load [kg] Work

15

SpeedHorizontal Work Load Graph LEY25l (Motor mounting position: Top/Parallel, In-line) 70 Lead 3: LEY25C 60 Lead 6: LEY25B LEF 50 Work load [kg] 40 LEJ LEL Lead 12: LEY25A 20 LEM 0 LEY 0 200 600 1000 1400 Speed [mm/s] LES LEY32l (Motor mounting position: Top/Parallel) LEY32D (Motor mounting position: In-line) LEPY LEPS 80 80 Lead 5: LEY32C Lead 10: LEY32B Lead 4: LEY32DC LER 60 60 Lead 8

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Proof pressure Operating temperature 0 to 200C Burst Pressure and Heat Resistance Performance 4.0 3.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 2.5 Pressure (MPa) 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4,

High Vacuum Angle Valve, XL Series

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

XL

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A LEY32A / LEYG32A LEY32B / LEYG32B LEY32C / LEYG32C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 19 300 15 300 2 40 400 23 400 20 400 3 48 500 27 500 30 500 4 56 600 32 600 40 600 5 64 700 44 700 50 700 6 80 800 54 800 60 800 7 100 900 77 900 70 900 8 150 1000 90 1000 80 1000 9 200 1200 120

Refrigerated Thermo-chiller

There are many types, including perfluoropolyether (PFPE), perfluorocarbon (PFC), hydrofluoropolyether (HFPE), and hydrofluoroether (HFE), but they share the characteristic of high electrical insulation properties, and grades can be selected with appropriate fluidity even at low temperatures, such as 100C, and high temperatures, such as 200C and above.

1.1

There are many types, including perfluoropolyether (PFPE), perfluorocarbon (PFC), hydrofluoropolyether (HFPE), and hydrofluoroether (HFE), but they share the characteristic of high electrical insulation properties, and grades can be selected with appropriate fluidity even at low temperatures, such as 100C, and high temperatures, such as 200C and above.

2

Bending value (Reference) 20 Complies with FDA (Food and Drug Administration) 177-1550 Operating temperature Air, Inert gas: 20 to 200C, Water: 0 to 100C (No freezing) dissolution test.