EX500-Sx03_eng Bit No. 1 3 5 7 1 1 5 7 SI unit (EX500-S 03) The direct current power supply to combine should be UL1310 Class 2 power supply when conformity to UL is necessary. Valve manifold Replacing the SI unit Remove the M3 hexagon screws from the SI unit and remove the SI unit from the valve manifold. Replace the SI unit. Tighten the screws originally.
Symbol Color Color indication Symbol Tube size 0425 0604 0805 1065 1208 Symbol Color Color indication Symbol Tube size 01 05 07 11 13 4mm (5/32") 6mm 8mm (5/16") 10mm 12mm 1/8" 3/16" 1/4" 3/8" 1/2" See Color Chart Below. See Color Chart Below. 1/8", 3/16", 1/4" Longer lengths available upon request. 4mm, 6mm, 8mm * Standard for 4mm (5/32") & 8mm (5/16") tube size.
Temperature characteristics 5%F .S. (0 to 50C, 25C reference) Leakage when fully closed *1 0.4 L/min or less 1 L/min or less Fully close function Shutoff function not provided Response time *2 10 s or less Input signal *3 Analog voltage input: 1 to 5 VDC Input impedance: 1 M Output signal *3 Flow rate pulse output LED indicator When the power is ON (PWR: Green is ON) When an error is detected
Nil M Inch size (Orange) 1/4" 5/32" 1/4" U How to Order Manifold Assembly (Example) Manifold Indicate the part numbers of electro-pneumatic regulators to be mounted below the manifold part number.
1 Controller/Driver type1 o Actuator cable type !0 Actuator cable length [m] LEM R Robotic cable (Flexible cable) 1 1.5 A 10 3 3 B 15 5 5 C 20 8 8 Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP12 LEY Cable is shipped assembled. (Programless type) NPN 1P PNP LES Produced upon receipt of order. Refer to the specications Note 5) on page 488.
S SHP SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy Seat material Ni-Cr-Mo alloy H Material PCTFE (Standard) Polyimide 3) PTFE 4) 5) Code No code VS TF Gauge port (Inlete, Outletr) Pressure gauge 1) psig/bar unit MPa unit Surface finish Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available
4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire
Terminal 1 2 3 6 5 4 Vin (P) Regenerative absorption unit power input (positive) 2 Temperature control output terminal Maximum rated voltage: 30V Maximum rated current: 6mA Vin (N) Regenerative absorption unit power input (negative) 3 Vout (P) Extended regenerative resistance output (positive) 1 Vout (N) Extended regenerative resistance output (negative) 4 Regenerative absorption unit Controller
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
5% F.S. or less?3% F.S. or less?2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?
Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Note 1) For 2-color indication type, use caution on hysteresis. Refer to page 19, Auto Switch Hysteresis prior to use. Note 2) Refer to pages 21 through to 23 for detailed auto switch specifications.