Series TPH Clean Tubing Polyolefin Tubing

R. Fittings & Tubing Air Cylinders Rotary Actuators How to Order TPS0604 B 20 Tubing model Color Length per roll Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20 m roll 100 m reel 20 m roll 100 m reel Burst Pressure Characteristics Curve and Operating Pressure Model TPS0604 TPS0805 TPS1065 TPS1208 TPS0425 Model 5 6 8 10 12 4 O.D.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

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frequency R 500 mm Stroke L 28 mm Bending radius R Special engineering plastic Material of flexible protection tube Not used Tube tie Test Results Flexible protection tube Tube Model Maximum abrasion after 10 million cycles (mm) TUZ0604 TU0604 0.16 0.46 10.5 As this test was an acceleration test, the tube bending radius was out of the flexible protection tube manufacturer's allowable range

LX

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s R, Rc, NPT, G)> VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Set screw (unused) q c r i Switch bracket (Stainless steel) e Dismounting Auto Switch 1. Remove the auto switch mounting screw from the switch holder. 2. Move the auto switch back towards the position where it stops at the lead wire side. 3. Hold up the lead wire side of the auto switch at the angle of around 45 . 4.

SYJ3000

For manifold type 31, S31, 32, S32 Body option 5 port 3: Common exhaust type for main and pilot valve 0: Pilot valve individual exhaust for the pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Large Flow Lubricator AL800/900 Series

(Example) 23-R Semi-standard Combinations Available Not available Accessory, Semi-standard Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right to left Note) -1, -1S-1 and -1S-2 are with

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

KK

Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 Applicable tubing O.D. mm 3.2 4 6 8 10 12 16 Applicable hose I.D.

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

KT10

P F H J L N P R Option Specification Standard (Cv: 0.06) High flow (Cv: 0.12) Code No code HF O-ring material 1) Not available for material code B.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Head side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Head side cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

High Power Cylinder Series RHC

3 y r t !1 A A Enlarged view of A Component Parts Description No.

LEC-OM069xx

For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.

LEC-OM071xx

For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V