SMC Corporation of America
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Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Thread Rc G NPT Nil None V V V A Yes 8 V B 5/16" V Port size 06 3/4" 10 1" * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

Maximum number of characters for password is 16. Changed password must be strictly controlled. If the password is forgotten and needs to be reset, CIP Object Reset service command can initialize the password.

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 15 V()50001000 4 V PLC 4000 -57No.EX-OMS0026CN EX600 byte EX600 byte EX600 byte byte EX600-SEN3/4 (32 ) 0 4 SI EX600-SEN3/4 (32 ) 4 4 () EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYF (16 ) 0 2 EX600-DME

No.PF-OMN0012-H PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Maintenance parts [1]Replacement Element Table6-1 3) Element number Element type Element Size Port size Symbol (mm) Paper Micromesh 06,08 EP420EM81064L95 10,12 EP020EM91074L117 16 EP520EM02088L158 20,24 EP620EM120119L208 Note) Refer to the Figure 2-1 for the assembly position.

*The numbers in a parenthesis correspond to the component numbers in the cross-section construction drawing on page 25. 16 4. Specification 4-1.

Relationship between the set pressure (16-Bit) and output pressure Set pressure 0 0x02BC Output pressure 0kPa 700kPa (Example) When the set pressure value is 0x02BC, the output pressure is adjusted to 700kPa.

19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31 39 65 65 65 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 32.9 33.9 33.9 33.9 46.9 46.9 32.9 71.9 71.9 16 D-F8 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6

No. , 15 No.120 No.2131 No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 20 - ,No.131(OUT 15), No. (:ON:OFF) No. 1 2 3 4 5 No. No.

MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18 16 MHL2-40D M0X1.5 24 12 MHL2-40D M10X1.5 36 20 Nm MHL2-10D M4X0.7 2.1 MHL2-16D M5X0.8 4.3 MHL2-20D M6X1 7.3 MHL2-25D M8X1.25 17.7 6 - 1. 2. 2 <> AS1200-M5AS2200-01 AS1000AS2000 AS1001FAS2051F

) 6N Motor option Ball screw lead With controller (PNP) 6P With controller (PNP) 6P Without lock Nil Without lock Nil Size Size With programless controller (NPN) With programless controller (NPN) 1N 1N With lock B With lock B 40 32 25 16 40 32 25 16 With programless controller (PNP) 1P With programless controller (PNP) 1P Stroke Actuator cable length 10mm 10mm 12mm 12mm 16mm 16mm 20mm 20mm

Warning(8) on p.16 8 Alarm for Stroke limit /code: 1-052 is generated. The actuator goes out the stroke limit specified by the basic parameters, Stroke (+) and Stroke (-) if it performs the requested operation.

Initial Setting.16 4. 1 Gateway unit Communication speed switch (B RATE) .16 4. 2 Setting the switch to change the communication CN2SW.16 4. 3 Setting of controller (LEC).17 4. 4 Setting of EtherNet/IP using RSLogix5000TM.20 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

Bore Chamfered type size Roller type Lever type with shock absorber Round bar type with female thread Chamfered type with female thread 12 10 10 16 10.15 10.15 20 10,15,20 10,15,20 32 10,15,20 40 20,25,30 20,25,30 20,25,30 50 3.

Installation example n,m L 0 1 2 3 4 5 6 7 8 9 10 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 n,m L 11 12 13 14 15 16 L1 160.5 171 181.5 192 202.5 213 L2 [mm] : L1 shows the dimensions of the VQC1000 series solenoid valve.