3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

NPT G Full stroke is 75 mm or less in the case of RZQB (through-hole type). Mounting Bracket Part No. Double clevis Note 2) Foot Note 1) Flange Bore size (mm) 32 40 50 63 RZQ-D032 RZQ-L032 RZQ-F032 RZQ-D040 RZQ-L040 RZQ-F040 RZQ-D050 RZQ-L050 RZQ-F050 RZQ-D063 RZQ-L063 RZQ-F063 Note 1) When ordering foot brackets, order two pieces per cylinder.

Exhaust Cleaner for Vacuum Pump AMV Series

Size (Applicable vacuum pump) 100 (4B) JIS 10K FF flange Symbol Max. exhaust speed (L/min) 3 6 15 37 75 160 360 650 1,500 3,700 7,500 16,000 Specifications Oil mist removal Filtration Maximum operating temperature 99.5% or more 0.3 m (Trapping efficiency: 95%) 80C Model Model Connection R Max. air flow (L/min [ANR]) Applicable vacuum pump Max. exhaust speed (L/min) Weight (kg) Oil accumulation

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.

CLJ2

Bore size Lock operation 16 16 mm Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Standard stroke (mm) Port location on head cover Nil R Perpendicular to axis Axial direction Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Nil S n G Rubber bumper only Cylinder stroke (mm) Rod end thread Nil F Male rod end Female rod end Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

silicon-free + Low particle generation Reed switch Type of auto switch Cylinder stroke (mm) Solid state switch Z7, A54/A59W J51/F5, Y5/Y7 21 22 Relief type Vacuum suction type Model Auto switch mounting Cushion Bore size (mm) 40 50 63 40 50 63 Lubrication Action Standard stroke (mm) Port size Model 1/4 10-/21-CA240 10-/21-CA250 10-/21-CA263 11-/22-CA240 11-/22-CA250 11-/22-CA263 Relief type 50, 75

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75

Series 10-MGF ø40, ø63, ø100 Guide Table

Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Standard Strokes JIS Symbol Double acting, Single rod Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Other intermediate strokes can be manufactured upon receipt of order. Manufacture of intermediate strokes in 1 mm intervals is possible. (Spacers are not used.) Refer to pages 13 to 16 for cylinders with auto switches.

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

Platform Cylinder Series CXT ø12, ø16, ø20, ø25, ø32, ø40

Nil S n Bore size/Stroke (mm) Stroke (mm) Bore size (mm) 15 25 50 75 100 125 150 175 200 250 300 Auto switch Nil Without auto switch (Built-in magnet) 12 16 20 25 32 40 For the applicable auto switch model, refer to the table below. Option Adjusting bolt with bumper only (Standard) Nil With 2 shock absorbers (Set on the driving cylinder side only when packed.)

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

3-phase 380 to 415 VAC (50/60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz5 A 16/18 8.4/9.1 Rated power consumption 50/60 Hz5 kW (kVA) 4.3/5.4 (5.5/6.0) 4.4/5.6 (5.8/6.3) Noise level (Front 1 m/Height 1 m)5 dB (A) 73 75

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

adjustment bolt RB 2015 + with adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt Configuration Shock absorber model MY1 W MY1 W 0 to 6 6 to 12 12 to 18 0 to 11.5 11.5 to 23 23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48 0 to 20 20 to 40 40 to 60 0 to 25 25 to 50 50 to 75

Air Cylinder Double Acting, Single Rod JCM Series ø 20, ø 25, ø 32, ø 40

Standard Strokes Bore size [mm] Standard stroke [mm] 1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

Thermo-chiller

, Bronze Resin PTFE, PU, FKM, EPDM, PVC, NBR, POM, PE, NR Power supply 3-phase 460 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 Sensitivity of leak current mA 30 Rated operating current5 A 14.2 Rated power consumption5 kW(kVA) 9.1 (11.4) Noise level (Front 1 m/Height 1 m)5 dB(A) 75

Series IDK Moisture Control Tube

Moisture Control Tube Series IDK Specifications IDK02 Model IDK04 Compressed air 0.7 MPa 0 to 40 (No freezing) IDK06 Fluid Max. operating pressure Operating temperature (C) Operating environment 1 Indoors, where product is not exposed to water (0 to 40C, Relative humidity 0 to 75%RH) 20 4 2.5 Min. bending radius 2 (mm) O.D. (mm) I.D.

Series 10-MGF Guide table ø40, ø63, ø100

Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Type Rc NPT G Bore size Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 (Both sides) Relief type Double acting 30, 50, 75

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Fluid Air Proof pressure 1.5 MPa 1.0 MPa Maximum operating pressure 0.1 MPa Minimum operating pressure 10 to 60C (No freezing) Ambient and fluid temperature Piston speed Note) 50 to 500 mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) +1.5 0 Stroke length tolerance mm Note) Speed with no load Standard Strokes Bore size (mm) Standard stroke (mm) 20 to 63 25, 50, 75