KC

(mm) 4 6 8 10 12 Effective area (mm2) Nylon Urethane 5.6 4 13.1 10.4 26.1 18.0 41.5 29.5 58.3 46.1 Applicable tubing Note) Weight (g) Model d D L A M KCH04-99 KCH06-99 KCH08-99 KCH10-99 KCH12-99 5 8 11 18 24 Note) D: Max. diameter 4 6 8 10 12 9.8 11.8 14 17 19 40.6 43.1 46.7 52.6 54.9 22.6 24.1 25.2 28.6 29.4 16 17 18.5 21 22 Applicable fitting 15-2-70 Self-seal Fittings Series KC Elbow Plug

VR4151/4152

A P2 R P1 0.5 s or more R P2 No output A A 2 Series VR51 Dimensions 70 45 (18) 4.9 Supply port P1(11) Flame resistant One-touch fitting: 6, 1/4 Exhaust port (with silencer) R(4) 10 26 9 27 Supply port P2(12) Flame resistant One-touch fitting: 6, 1/4 Output port A(2) Mounting thread 11.5 22 Flame resistant One-touch fitting: 6, 1/4 2-M5 x 0.8 Thread depth 5 45 Mounting thread 2

0.4

Suction flow rate Nl/min Air consumption Nl/min Vacuum pressure (mmHg) Vacuum pressure (mmHg) Vacuum pressure (mmHg) Vacuum pressure (mmHg) Suction flow rate Suction flow rate Nl/min Supply pressure (MPa) Nozzle Diameter 1.0 Exhaust Characteristics Flow Characteristics Manifold Optional Parts Vacuum pressure Air consumption Suction flow rate Suction flow rate Nl/min Supply pressure (MPa) 70

TL/TIL

136 Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility 100% Acetic acid VC Note 1) 100% Acetone VDW 40% Ammonium fluoride VQ 30% Ammonium hydroxide VX2 100% Butyl acetate VX 100% Methylne chloride VX3 38% Hydrochloric acid VXA 50% Hydrofluoric acid 60% Hydrogen peroxide VN 100% Methanol LVC Methyl ethyl Ketone LVA 70%

2-Color Display

Elbow type 6 mm 1/4 inch Sensor pressure receiving area: Silicon Sensor pressure receiving area Wetted parts material PBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR 81 g 85 g 43 g C3602 (electroless nickel plated) O-ring: HNBR Piping port Including lead wire with connector (3 cores, 2 m) 71 g 75 g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g 70

EX180

156 k/625 kbps 2.5 M/5 M/10 Mbps Communication speed 125 k/250 k/500 kbps Specified file Note 2) EDS file Occupied area (Number of inputs/outputs) SDN1: 0/32 SDN2: 0/16 32/32 (1 station, remote I/O stations) Terminal resistor Built in the unit (Switch setting, 110 ) Not applicable For unit 11 to 25 VDC 15 to 30 VDC Power supply 24 VDC10%/5% For valve Internal current consumption (Unit) 70

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Shock Absorber Specifications RB1007 RB1412 RB2015 RB2725 Shock absorber model MGG20 MGG25, 32 MGG80, 100 Applicable guide cylinder MGG40,50,63 Maximum energy absorption (J) 5.88 19.6 58.8 147 Stroke absorption (mm) 7 12 15 25 DMaximum collision speed (m/s) 5 70 45 25 10 Max. operating frequency (cycle/min) -X Ambient temperature range ( C) 10 to 80 Individual -X 4.22 6.86 8.34 8.83 Spring

Thermo-chiller Series HRZ Fluorinated Fluid Type

/humidity Note 1) HRZ002-L HRZ004-L HRZ008-L HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ002-W HRZ008-W Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35C, Humidity: 30 to 70%RH 20 to 40C: FluorinertTM FC-3283/GALDEN HT135 20 to 90C: FluorinertTM FC-40/GALDEN HT200 FluorinertTM FC-3283/GALDEN HT135 FluorinertTM FC-40/GALDEN HT200 Circulating fluid Note 2) Temp. range setting

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

MY3M Shock Absorber Specifications RB 0806 RB 1412 RB 2015 RB 1007 Model Max. energy absorption (J) 2.9 19.6 58.8 5.9 Stroke absorption (mm) 6 12 15 7 Max. impact speed (mm/s) 1500 1500 1500 1500 80 45 25 70 Max. operating frequency (cycle/min) Extended 1.96 6.86 8.34 4.22 Spring force (N) Compressed 4.22 15.98 20.50 6.86 Operating temperature range (C) 5 to 60 The shock absorber service

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

RB 0806 RB 2015 RB 2725 RB 1412 RB 1007 Symbol Specifications Model -XB11 Long stroke type 0.84 29.8 46.6 10.1 2.4 Max. energy absorption (J) Shock absorber soft type Series RJ type -XB22 Stroke absorption (mm) 6 15 25 12 7 1000 Max. collision speed (mm/s) -X168 -X416 -X417 Helical insert thread 80 25 10 45 70 Max. operating frequency (cycle/min) Holder mounting bracket Extended 1.96 8.34

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

0.178 x 500 50 = 3.442 kg CY1L CY1H Shock Absorber Specifications CY1F CY1S6 CY1S10 CY1S15 CY1S20 CY1S25 CY1S32 CY1S40 Applicable cylinder CYP Shock absorber model RJ0604 RJ1412L RJ0806H RJ0806L RJ1007L RJ2015H RJ2015L Max. absorbed energy (J) 1 30 3 10 0.5 Stroke absorption (mm) 6 15 7 12 4 Collision speed (m/s) 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1 0.05 to 1 0.05 to 1 80 25 70

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Shock Absorber Specifications RB0805 CX2N10, CX215 RB1006 CX225 0.98 Shock absorber Applicable slide unit Maximum energy absorption (J) 3.92 Stroke absorption (mm) 6 5 Max. collision speed (m/sec) 0.05 to 5 70 80 Max. operating frequency (cycle/min) Max. allowable thrust (N) 353 147 Ambient temperature range (C) CX2 10 to 80 Extended 4.22 1.96 Spring force (N) Retracted 6.18 3.83 CXW Mass

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Symbol Specifications 6, 10 15, 20, 25, 32, 40 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -X1468 Hydro specifications 1200 Axial ports 100 40 40 1100 High speed specifications 90 1000 900 Bore size 10 Bore size 10 Helical insert thread specifications Theoretical thrust (N) Theoretical thrust (N) 80 Bore size Bore size Added mounting tap positions for slider 70 800 700 32 32 Non-lubricated

Industrial Filter FGD Series

Symbol Nominal filtration accuracy (m) Note) Stainless steel 304/Epoxy Stainless steel 316 Polyester/PP Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 FGDT, F FGDC, E Note 1) The industrial filter described in this catalog are products in which an element is incorporated into a vessel.

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. 848

Large Flow Air Filter AF800/900 Series

Large Flow Air Filter AF800/900 Series AC-A AF-A Standard Specifications AF900 AF800 Model AF-A 1 4 1 2 Port size 1 2 1 AR-A 1.5 MPa Proof pressure Maximum operating pressure 1.0 MPa AL-A 5 to 60C (No freezing) Ambient and fluid temperature Standard specifications: 5 m Option: 2, 10, 20, 40, 70, 100 m Polycarbonate Filtration Bowl material AW-A 45 cm3 Bowl capacity (cm3) AC-B Weight (kg)

AP3500

Vacuum to 250 psig (1.7 MPa) Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70 to 110 psig (0.48 to 0.76 MPa) 10-32 UNF thread Side Bottom mount 0.06 in3 (1.07 cm3

AP500

1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70