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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing VQ printing WQ 10270SZ Printed in Japan. D-G

Thread type Nil R, Rc N NPT F G 1 4 Port size 02 Female Female Male Female Female Male 10 1 2 14 20 1 1 Male Male Male VEX 03 3 8 1 AN 04 1 2 06 3 4 AMC Specifications JIS Symbol Ambient and fluid temperature Fluid Compressed air 5 to 60C 0.1 MPa or less Element inlet pressure Noise reduction Oil mist removal 35 dB or more 99.9% or more How to Order Oil Bowl Assembly Drain cock (Standard

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 1/4 3/8 1/2 3/4 1 1 1 2 10 13.3 18.6 22.5 47 107 132 169 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 6.9

CD1 CD2 CL CP 0.500 0 -.002 0.106 2.28 1.94 NCDP-150-SUS 0.750 0 -.002 0.140 3.10 2.72 NCDP-325-SUS Note: Cotter Pins are included. 7 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard Noblesville, IN 46060, U.S.A.

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 ) ) ) ) ) ) ) ) Options Symbol Description ) ) Nil 1 B With bracket Built-in silencer (EXH port) Handle / Bonnet material Symbol Material S A B Flame resistant PBT 3 Aluminum Built-in silencer A spacer or spacer with bracket is required if the valve is combined

DC: Can be attached to Grommet, Conduit, Conduit terminal. 3 8 03 CE-compliant: Electorical entry is applicable only for the DIN terminal.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printing WY 9520KS Printed in Japan. D-G

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

.%4S 40 30 39 II i ~g: D Sll:PR,~~RE~'mCil 0 0 M N '" 6 ;e;V 'P -$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

-3502-2740 Fax:03-5251-7240 SMC CORPORATION l si printing June 1995.0-036,P-56(M) Augus< 1996, 45(RP) Specllications are subJeclto change without poor notICe Printed in Singapore and any obhgatlOn on the pari of the manufacture.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OV printing OV 7150SZ Printed in Japan. D-DN

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.