High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

XL-OMY0003

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

Air cylinder

Grease pack part number: GR-S-010 (10g), GR-S-020 (20g) Apply plenty of grease to the internal and external circumference of a new rod seal for replacement (See Table 4, P19). Fill the groove with grease. Refer to Page 21 for made to order product (XC85, X446). c) Mounting Mount taking care that the rod seal is in the right direction.

CG1x-OM0006N

P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

MWP_E

Grease weight GR-S-010 10g GR-S-020 20g -15- Basic Circuit for Cylinder Operation The basic circuit for operating the product with air filter, regulator, solenoid valve and speed controller (meter-out) is shown in the following figure. It is possible to use a quick exhaust. Regulator Air source Speed controller Air filter Solenoid valve .

CEP1

, , 50~300mm/s , 7 ? , , 9 6-2 ? 3,4,9 ? , , 3 ? , ,, 3,9 ? 50~300mm/s 7 ,? , 3,9 ? , 3,9 , ? , , 4 ? , 2,3

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Select Nil, S, or T for DeviceNetTM or CC-Link. Select Nil, 1, 3, or 5 for parallel input. 5 - Caution Actuator and controller are sold as a set. When purchasing without controller, make sure that the combination of actuator and controller is correct. Actuator matches Actuator part number described in controller. LEFS25GB-100 3.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

VFR3000 Series

area at exhaust side (mm2) AEA 40 1.25-3.5M, 1.25Y-3L, 1.25-3M 36 S at P2=0.5 MPa BEB Although A-, COM+ and Bmarks are indicated on the Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa. terminal block, VFR3000 can be used as either +COM or Note 2) Set the pressure within operating pressure range of -COM. solenoid valve.

SJ1000/2000/3000 Series

Detachment To detach a socket from a connector, pull out the lead wire while pressing the socket s hook with a stick having a thin tip (approx. 1 mm). If the socket is used again, spread the hook outward.

Fieldbus system EtherNet/IP TM compatible SI unit

Mount the marker (EX600-ZT1) into the marker groove as required. -18No.EX-OMN0032-D SI unit Model Indication and How to Order EX600-S SI unit Polarity of output Symbol Content Protocol 1 PNP (-common) Symbol Content 2 NPN (+common) EN EtherNet/IPTM Summary of Product parts No.

Solenoid Valve

How to Calculate Flow Rate IP67 Enclosure Conversion with sonic conductance C: S=0.5XC Q : Air flow rate [dm3/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [] Wiring connection for models conforming to IP67 should also have enclosures equivalent to or of stricter than IP67. 11 No.VQC1000V-OMM0002-B VQC1000/2000 series Specific

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Model Indication for Manifold (1) Number of stations 01 1 station 02 2 stations 12 12 stations (2) Pressure sensor/Vacuum pressure switch mountable Note 1) NIL Sensor/ switch non-mountable base S Sensor/ switch mountable base Note 1) Select S when the model with either the pressure sensor or the pressure switch for vacuum is selected for how-to-order for the single unit (8)