Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1 21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19

3 Port Solenoid Valve/

Secondary battery compatible 19 Safety Standard ISO13849-1 Certified 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection of Main Valve Position VG342-X87 Valve Specifications VP500/700 VG342 X536 X538 X555 X87 Specific Product Fluid Air Type of actuation N.C.

VEX1

If the socket is to be re-used as it is, return the hook to the outside. 5.1-18 VEX3 Base mounted/VEX322 Air operated: VEX3220 External pilot solenoid: VEX3221 Internal pilot solenoid: VEX3222 DlN connector(D) Caution How to Use DIN Connector Refer to p.1.5-6 5.1-19 VEX3 Body ported: VEX332 Air operated: VEX3320 External pilot solenoid: VEX3321 Internal pilot solenoid: VEX3322 DlN connector

VM

Twist selector (3 position) VM133-M5-35R/B/G/Y VM153-M5-35R/B/G/Y Panel mounting hole JIS Symbol 3 port 5 port 3-M5 x 0.8 Depth 4 R port (5 port only) 0.5 MPa supply 20 N F.O.F. 45 T.T. 5-6-19 2/3 Port Mechanical Valve Series VM200 Large flow capacity. A variety of actuator types.

MICRO MIST SEPARATOR

REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12. DIMENSIONS 24 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Gripper Series MRHQ

Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger closing port (mounting screw attachment ) 5 24.5 9 Max. 9.2 51 4-M6x1 Depth 9 (two on opposite side) M5 x 0.8 Finger opening port 3-R2.5 24 3.4 62 16.5 27 19

Modular Type Regulator Series AR

176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19

VCA

depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19

3

Unit Note 9) Instantaneous flow L/min, cfm (ft3/min) Accumulated flow L, ft3 Displayable range Instantaneous flow 25 to 525 L/min (Displays [0] when value is within 4 to 4 L/min range.) 50 to 1050 L/min (Displays [0] when value is within 9 to 9 L/min range.) 100 to 2100 L/min (Displays [0] when value is within 19 to 19 L/min range.)

MIST SEPARATOR

REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12. DIMENSIONS 24 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Regulator Valve

Insufficient tightening of the bolt Foreign matter is caught in the gap betw een the mounting surfaces (19) Abnormal amount of air leakage is found from the 3 (R) port. Foreign matter is caught in the poppet valve on the exhaust side. (3) (6) Foreign matter is caught in the poppet valve on the supply side.

MHY2/MHW2

closing port) MHY2-16D2 43.4 Opening/closing direction through hole type (Hole for mounting attachment) 8 0.005 0.025 4 7 14 (Limited area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 2.8-12 180 Angular Gripper Series MHY2 MHY2-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

INFORMATION Step Motor Controller 5 types of communication protocols New New

Controller JXCE1/91/P1/D1/L1 Series Dimensions JXCL1 35 4.5 For body mounting (Screw mounting) (11.5) 67 32.5 1.2 84.2 64.2 35 193.2 (When removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Vacuum Saving Valve

5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 R1/8 G1/8 NPT1/8 3.4 5.9 3.1 5.1 3.2 5.5 5 6.2 8 6.9 4.5 8 6.2 8 6.9 3.4 4.5 3.1 5.1 3.2 14.7 20.1 22.6 22.5 23.3 16.6 16.2 23.5 23.4 24.2 18.1 26 25.7 27.6 26.5 20 20.7 26.6 28.5 27.4 8 12 12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Stainless steel Aluminum alloy Side plate B Hexagon socket head cap screw 15 Electroless nickel plated 35 Flat washer Hexagon socket head cap screw Stainless steel 16 Stainless steel Stainless steel 36 17 Stainless steel Spring washer Flat washer 37 Stainless steel 18 Stainless steel Flat washer Top cover 38 Electroless nickel plated Aluminum alloy Electroless nickel plated Aluminum alloy 19

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Multistage Ejector (N)ZL Series

)ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 8 Multistage Ejector Series (N)ZL Dimensions (mm) / Series (N)ZL112 (with Valve) 1in = 25.4mm Scale: 40% With supply valve and release valve (N)ZL112-K1L-E25 (L) P 2-5.4 Mounting hole 13.5 50 117 Manual override Vacuum pressure switch Exhaust with silencer Release valve P V 20 V RESETSET Supply valve 4.5 166 19

AXTS-OMY0007

scale and operation frequency AXTS040*-2(B)-X2 Internal pilot type AXTS040*-2B-X2 Internal pilot valve Ratio of operating frequency and ON time AXTS040*-2(B)-X2 ON OFF adjustment OFF[] 10 needle [rotation] Frequency [Hz] 1 3 5 7 7 5 3 1 8 2.1 Hz 2.6 Hz 3.1 Hz 3.8 Hz 1 [Hz] 31% 64% 74% 73% 6 2.6 Hz 3.0 Hz 3.4 Hz 4.2 Hz ON adjustme nt [Rotation] 3 4 Number of rotation of ON adjustment needle 19%