SYJ300/500/700

) P=16 18.5 (2.3) VP M5 x 0.8 (A port) S070 (Station n) (Station 1) VQ VKF 15 3 3 VQZ 14.5 L4 8 8 M3 x 0.5 (Bracket mounting screw) VZ L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 76.4 43.6 [50.6] Max. 10 75.1 68.9 28.2 57.6 M8 x 1 48.1 30.6 54.7 [61.7] Approx. 300 (Lead wire length) Pg7 66

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

VFR

340 5 285 297 4 242 254 3 199 211 2 156 168 Stations L L1 L2 Formula L1 = 43 x n + 70 L2 = 43 x n + 82 E: Grommet terminal T: Conduit terminal D, Y: DIN terminal Applicable cable O.D. 4.5 to 7 Applicable cable O.D. 6 to 8 Max. 10 Max. 10 Applicable cable O.D. 2.3 to 2.8 : With light/surge voltage suppressor : With light/surge voltage suppressor : With light/surge voltage suppressor 3-5-66

VFS

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

VHK

L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66

Air Filter

40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 273.9 Semi-standard specifications Metal bowl with PC/PA bowl Metal bowl level gauge With element Model With With With With With With service indicator barb drain drain drain drain drain fitting guide cock guide cock guide B B B B B B A C1 AF20-D 91.4 87.4 93.9 40 50.6 AF30-D 123.9 122.2 117.8 122.3

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Rotary Clamp Cylinders

Graph (2) 3 MK250/63 2 When arms moment of inertia is 5 x 103 kgm2, cylinder speed should be less than MK232/40: 66 mm/s MK250/63: 120 mm/s. For calculating moment of inertia, refer to front matter 1, 2, back page 8. Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

Lubricator

40.5 11 13 113 3.2 52.5 AL60-D 1 95 223.1 48 45 110 45 70 66 40.5 11 13 113 3.2 52.5 Semi-standard bowl Semi-standard specifications Metal bowl with level gauge PC/PA bowl Metal bowl Model With drain cock With barb fitting Without drain cock With drain cock Without drain cock With drain cock B B B B B B AL20-D 87.6 84.5 87.4 AL30-D 115.4 123.9 104.3 117.8 124.3 137.8 AL40-D 147.1 155.6

Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

Large Size Vacuum Module: Series ZR

ZR1-SR2-66-A(a set of four threads) ZL Standard (Without options) Standard (Without options) With function plate Standard (Without options) With function plate Standard (Without options) With function plate Standard (Without options) With function plate 12 ZR1-SR2-18-A(a set of six threads) ZR1-SR2-33-1A(a set of two threads) 13 ZY ZR1-SR2-39-1A(a set of two threads) ZR1-SR3-54-A(a set of

Compact Cylinder with Lock Series CLQ

(mm) CLQ D-A72/A7H D-A80H/A73C D-A80C/F7BAVL D-F7BAL/F79F D-F7W/F7 D-J79/F7V D-J79C/J79W D-F7WV Auto switch model RLQ D-A73 D-A80 D-A79W D-F7NTL D-P4DWL MLU MLGP Bore size (mm) A B A B A B A B A B ML1C 20 25 32 40 50 63 80 100 41 6 41.5 6.5 46.5 11.5 38.5 3.5 47 8.5 47.5 9 52.5 14 44.5 6 43 4.5 46 11.5 46.5 12 51.5 17 43.5 9 42 7.5 51.5 14.5 52 15 57 20 49 12 47.5 10.5 60.5 18 61 18.5 66

Cylinder with Lock/Double Acting, Single Rod Series CLS

Contents Bore size (mm) CS1N125A-PS CS1N140A-PS CS1N160A-PS 125 140 160 180 200 250 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS ^0 61 ^2 ^3 ^4 ^5 66 ^7 68 Wiper ring Cushion seal Set of left nos. ^0, ^2, ^3, ^4, ^5, ^7 Rod seal CS1N200A-PS CS1N180A-PS 61, 66 and 68 are non-replaceable parts, so they are not included in the seal kit.

Toggle Type Air Gripper

1.25 bottom hole dia. 6.8 through Thread for mounting attachment 648 A Series MHT2 Toggle Type Air Gripper Dimensions 2 x M10 x 1.5 thread depth 12 Mounting thread 25 MHT2-50DZ 52 100 80 4 x M8 x 1.25 thread depth 14 Mounting thread 10 22 40 54 4 x M10 x 1.5 thread depth 12 Mounting thread (Both sides) 8 8 Open 23 Closed 2 50 0.2 124 110 64 30 7 50 0.2 36 2.5 10 16 60.5 (157) 52.5 35 66

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Principal Parts Material C3604 (Electroless nickel plate) (Nipple M-3N, M-5N: Stainless steel 303) Nylon 66: GF30%, Stainless steel 304: NBR (PVC for M3) Material Body Gasket Body of M-5E, M-5ER, M-5M is not surface-treated. Electroless nickel plate treated is available as option -X2.

Electric Actuators

CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LECP6llD-l) (11.5) Refer to page 26 for L dimension and part number of DIN rail. (81.7) 66 35 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) 27 Controller (Step data

Low Profile Air Gripper Series MHF2

MHL E-E Close: 0 +0.1 0 Open: 201 MHR MHK 8 x M4 x 0.7 thread depth 4 4 x M6 x 1 thread depth 6 40 (Attachment mounting thread) (Mounting thread) MHS MHC Auto Switch Mounting Groove Dimensions MHT 52 24 MHY 2.3 MHW 4 2 x 3H9 +0.025 0 depth 3 6 -X 16 16 3 7.5 7.5 MRHQ 2 x M6 x 1 thread depth 6 MA (Mounting thread) Groove for auto switch mounting D25 56 465 Series MHF2 Dimensions MHF2-20D1 66

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 45 47 47 48 49 55 56 56 57 57 58 59 59 60 61 62 63 66 67 68 68 68 69 70 70 71 72 75 77 79 81 82 83 86 86 87 88 How to Order . Specifications. Dimensions . Series PSE560 Pressure Sensor For General Fluids. How to Order . Specifications.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y N LQ2H2A-F LQ2H2B-F LQ2H2C-F LQ2H2D-F LQ2H2E-F LQ2H2F-F LQ2H3A-F LQ2H3B-F LQ2H3C-F LQ2H3D-F LQ2H4A-F LQ2H4B-F LQ2H4C-F LQ2H4D-F LQ2H5A-F LQ2H5B-F LQ2H5C-F LQ2H5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 39.2 19.9 19 16 18 1/4" 21.5 44.2 43.7 46 45.5 52 51 57 56 63.5 64.5 65 66 1/4" 21.5 26.2 22 24 24 3/8" 25 3/8" 25 21 33.1