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Table e Combination of electrical entry and light/surge voltage suppressor Electrical entry Indicator light and surge suppressor Manual override Valve size G E C T D DL S Z L 1, 2, 3, 4 (Only G) (Except for G) 5, 6, 7 (Except for DL) (Only T) (Only T) 4.2-11 VNB How to Order Seal material NBR seal FPM seal EPR seal Body option V A B C Standard Bracket None With bracket Vaccum pilot Stainless

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"r5 L+' tL-l-s!"

4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"r5 L+' tL-l-s!"

SFD-EL050) t Check that two connecting brackets B are attached to the filter body, and assemble the filter body to the groove of the block. GD y Mount the connecting bracket A on the assembled filter body, and tighten the hexagon socket head cap screw with the following torque.

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 163 C O N T E N T S HRSH Series Inverter Type HRS HRS

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 135 C O N T E N T S HRSH090 Series Inverter Type HRS

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

S 1 pc. 3 3 pcs. n n pcs. Mounting type * Only for D and T mounting types. * Pivot bracket is shipped together with the product. * For details, refer to page 400. * For applicable auto switches, refer to the table below.

T2 = [s] L 0.5 V (T1 + T3) V Duty ratio: Ratio of T to T6 T T6 x 100 T = T1 + T2 + T3 + T4 T4 varies depending on the motor type and load. The value below is recommended. = 0.1 + 0.90 + 0.1 + 0.05 = 1.15 [s] 2000 T4 = 0.05 [s] 1000 mm/s2 3000 mm/s2 Step 3 Check the allowable moment. 1500 5000 mm/s2 Refer to Dynamic Allowable Moment graphs (Pages 127 and 128).

Fittings & Tubing Air Cylinders Rotary Actuators 2 x NN DL 24 Relief port M5 x 0.8 I H2 H1 2 x P (Rc, NPT, G) Width across flats B2 Standard port Width across flats B1 HC 2 x Eh8 D Relief port NA NA NA 20 20, 25 G Relief port M5 x 0.8 G MM AL N 1.5 N F A 1.5 F H S + Stroke K (This drawing shows the cases of 20 and 25.)

+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x

MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Finger closing port Mounting thread MHC 26 74 10.6 MHT E MHY 20 20 24 33 MHW E MRHQ 2-4.3 through

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

Series AS-FG Dimensions: Elbow Type (Hexagon width across flats) Applicable tubing O.D. d M5 type U10/32 type Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT) 1 4 T Connecting thread Part No.

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7