Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN 1 2 3 4 5 6 7 8 9 M VVQ1000-90-6 85.5 35 VVQ1000-90-7 98 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-10 135.5 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 6.5 11 38 3 6.5 11 38 1/4 VVQ1000

S070

6 52 58 7 59.2 65.2 8 66.4 72.4 9 73.6 79.6 10 80.8 86.8 11 88 94 13 102.4 108.4 14 109.6 115.6 15 116.8 122.8 16 124 130 17 131.2 137.2 18 138.4 144.4 20 152.8 158.8 L1 L2 4-11-11 12 3 Port Solenoid Valve Series S070/Body Ported Manifold Stacking Type Specifications How to Order Manifold How to Order Manifold Assembly Enter the part numbers of the valves and options to be mounted below

240

4 8 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 9 Motor plate Aluminum alloy Anodized 10 Guide ring Aluminum alloy Size 10 only 11 Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper !2 e w i !1 t !

MXH Series Compact Slide

9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

IDX-OM-W095

T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

Digital Gap Checker

N None 1 2 n T 7 Digital Gap Checker With Control Unit ISA3 Series 3-Color Display RoHS How to Order G C N M B 2 ISA3 L 1 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm 2 port solenoid valve Rated voltage Piping specifications Output specifications Nil 24 VDC 1 *11 100 VAC 2 *11 110 VAC *11: Made to Order N NPN output P PNP output Supply side Detection side Unit

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for Wireless Base 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for Wireless Remote 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

HEC-OM-S008

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

JXCx-OMT0032CN

6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31 12. . 32 12.1 . 32 12.2 IF(IN Data) . 38 12.3 (IN Data) . 38 12.4(OUT Data) . 40 13.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Sine Rodless Cylinder Series REBR Direct Mount Type

12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series REBR Model Selection 3 Design Parameters 2 Maximum Load Weight when Loaded Directly

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

298 287.5 267 15.5 12 310.5 300 283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

VXA21/22

13 C 10.5 13 [ ]: Individual pressure style 4.1-66 Direct Air Operated 3 Port Valve Series VXA31/32 For Air, Gas, Vacuum, Water and Oil Proper selection of body and sealing materials permits application of a wide variety of fluids.

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

25

0.5 0.5 IZD IZE 11 13 8.8 8.8 6.5 7.8 10.2 10.2 IZH 13 14 60 7 7.7 Detection hole 1 6 10.5 2 x R3.3 10 61 (7.5) Auto balance sensor [High accuracy type]/IZS31-DG 2 x 3.4 2 x 3.4 Amplifier Head 3500 1500 0.2 0.2 20 4.8 6.6 4.8 69 95 23 78 98 14.5 5 8.8 7.8 10.2 10.2 13 Sensor 60 7.7 71 12 1 6 14 2 x Counterbore 6.6, Depth 5.7 (Height of thread bearing surface 8.8) 433 IZS40/41/42 Series Dimensions

MGC

11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80

Series MXP Precision Air Slide Table

Heat treatment 1 Stainless steel Body Heat treatment 2 Stainless steel Table 7 1 2 8 9 6 13 12 11 3 Resin Cover 4 Resin Return guide 5 Scraper Electroless nickel plated 6 Brass Piston Electroless nickel plated 7 Carbon steel Joint shaft Electroless nickel plated 8 Brass End cap 9 Polyurethane Rod bumper 10 Steel ball High carbon chrome bearing steel Electroless nickel plated 11 Plug Brass

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Hexagon width across flats 21 11 Width across flats 37 45 Width across flats 24 28 4 x M4 x 0.7 H 3 x M3 x 0.5 H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B D B D Dimensions Model Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model ZPX40HB-01-B 8 ZPX63HB-01-B10 M8 x 1.25 M10 x 1.5 40 41 28 43 20.5 47 69 13 63 65 46 68 31.5 58 80 21.5 32 43 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX50HB