Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Rotary Table

Description Qty. 9 Gasket 1 9 Gasket 1 9 Gasket 1 9 Gasket 1 Parts included 12 Wear ring 4 12 Wear ring 4 12 Wear ring 4 12 Wear ring 4 in seal kit 13 Piston seal 4 13 Piston seal 4 13 Piston seal 4 13 Piston seal 4 18 Seal washer 2 18 Seal washer 2 18 Seal washer 2 18 Seal washer 2 Please refer to Page 23 for the product construction. Table 18.

IDX-OM-W053

K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 . 14-3 15 V 15-1 . 15-1 15-2 . 15-2 15-3 . 15-2 16 16-1 . 16-1 2 i i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-3 i i 2 6 WARNING !

LVQ

Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.

Fieldbus system Digital unit

9 Input 11 Input 13 Input 15 Input signal Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0036-B Input signal assignment (EX600-DX F) Group 0 1 2 3 4 5 6 7 Terminal position Pin 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Input signal Pin 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Dimensions EX600-DX B -31No.EX-OMN0036-B EX600-DX C EX600-DX D -32No.EX-OMN0036

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

15 18 24 38 11 13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 0.15 0.29 0.56 1.04 2.6 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 1300 3100 5000 7900 15300 6000 11000 18000 28000 54000 8-25-25 25 Series MGZ/MGZR Proper Auto Switch Mounting Position (Detection at stroke end) D-M9N/M9P/M9B D-F9NW/F9PW/F9BW A 28 28 26 D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24

Auto Switch Guide

Weight Auto Switch Internal Circuit D-F7NV (g) D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown 11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch OUT Black 81 92 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7PV Indicator light DC (+) Brown Main circuit of switch Main circuit of switch OUT Black DC () Blue D-F7BV OUT (+) Brown Most sensitive position OUT () Blue 7-9

2-Color Display Digital Flow Switch Series PFM

Port size Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 13 39 17 17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

1

Refer to pages 11 to 13 for cylinders with auto switches.

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

Possible to transfer a workpiece at low-speed.

A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

MHK2

-16 Closed 1 3 13 Open MHKL2-20 Closed 1 11 Open MHKL2-25 Closed 1 11 Note) There is no protrusion if no values are entered in the table. 12-6-16 16 Series MHK2 Made to Order Specifications: Please contact SMC for the details on dimensions, specifications, and delivery.

MHK2

-16 Closed 1 3 13 Open MHKL2-20 Closed 1 11 Open MHKL2-25 Closed 1 11 Note) There is no protrusion if no values are entered in the table. 12-6-16 16 Series MHK2 Made to Order Specifications: Please contact SMC for the details on dimensions, specifications, and delivery.

SMC Electronic Switch Series Variations

13 Dimensions/Base Mounted Style: ZSE2-0R Grommet style/ZSE2-0R-15 Connector style/ZSE2-0R-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 15 9 9 L H L H 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 30 25 30 (3000) (3000) 3 40 9.5 3 40 1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions

Wedge Cam Operation Gripper Series MHK2

Lead wire: In-line entry Lead wire: Perpendicular entry L L L Unit: mm In-line Perpendicular Lead wire Auto switch Finger position Air gripper D-F9BV D-F9B D-F9NV D-F9N D-F9BA Open 2 7 MHK2-12 Closed 7 3 12 Open 2 6 MHK2-16 Closed 8 1 1 3 13 Open 1 MHK2-20 Closed 5 1 11 Open MHK2-25 Closed 6 2 12 Open 3 MHKL2-12 Closed 3 7 12 Open 1 MHKL2-16 Closed 1 1 3 8 13 Open MHKL2-20 Closed

CE2

22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25

4-channel Flow Monitor ( compatible)

5th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 8 R/W Line name 8th letter Y U8 0x00 Refer