PFxx-OMJ0005CN

L/min [F 1] 25 [ ] 3% [H_1] (OUT1) PFM7100.3 L/minPFM7250.8 L/min PFM7501.5 L/minPFM7113 L/min [CoL] [SoG] ON OFF [oU2] (OUT2) [HYS] [2ot] (OUT2) [2_P] [ ] 50 [P_2] (OUT2) PFM7105 L/minPFM72512.5 L/min PFM75025 L/minPFM71150 L/min [F 2] 27 [ ] 3% [H_2] (OUT2) PFM7100.3 L/minPFM7250.8 L/min PFM7501.5 L/minPFM7113 L/min [F 3] [FLU] [Air] N2 28 [F 4] [rEF] [Anr] 29 [F 5] [rES] [1 . 00

PFxx-OMP0001CN

[F 2] OUT2 OUT1 -40No.PF-OMP0001CN-F [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -41No.PF-OMP0001CN-F [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 90 L(9 ft 3 3 3 50 L 60,010 L 203,481,020 L (54 ) (44 ) ((46 )) -42No.PF-OMP0001CN-F [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -43No.PF-OMP0001CN-F [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20][inP] [inP

Digital Flow Switch ( compatible)

Wind mode lower side set value 12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -87No.PF-OMZ0002-A [Line name communication data] Value (16 hex number) 00

PFxx-OMS0001CN

-46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

Digital Flow Switch ( compatible)

Wind mode lower side set value 12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -83No.PF-OMY0002 [Line name communication data] Value (16 hex number) 00

PFxx-OMX0002

upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -83No.PF-OMX0002-B [Line name communication data] Value (16 hex 00

PFxx-OMX0007

upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -48No.PF-OMX0007-A [Line name communication data] Value (16 hex 00

4-channel Flow Monitor ( compatible)

mode/output style 16 Line name (left side 4 digits, right side 5 digits) 17 Display channel 18 CH1 measurement display value 19 CH2 measurement display value 20 CH3 measurement display value 21 CH4 measurement display value 22 Display OFF (No display) : Settable : Not settable (negative acknowledge) -87No.PF-OMA1011-A [Line name communication data] Value (16 Hex number) 00

PF-OMM0004_C

OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20] =00

Digital Flow Switch (Remote type monitor unit)

L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_2] Set value (OUT2) [F 2]/[ oUt2] Page 37 5% of max. rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_2] Hysteresis (OUT2) [F 3]/[ RES] [ rES] Response time setting [ 1 .00

PF-OMN0011_C

[F 2] OUT2 c()F( oF)() -38No.PF-OMN0011CN-C H_t Ht Ht H_t Ht Ht -39No.PF-OMN0011CN-C [F 3] [F 3] [RES] [F3] 7 s -40No.PF-OMN0011CN-C [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] OUT1 OUT1 OFF [F10] -41No.PF-OMN0011CN-C -42No.PF-OMN0011CN-C -43No.PF-OMN0011CN-C == 1 / ,/ ([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

HRX-OM-S004

Setting unit: 0.5 hours to For example: Stop timer setting performed at 4:30 PM to stop the product operation 1.5 hours later (at 6:00 PM). PV SV 6. Press the [MENU] key once. Returns to the display showing the circulating fluid temperature. PV SV 7. Once the run timer is set, keep the power supply to the product ON. The product will start automatically after the set time.

A_HEC-OM-K001

ERR 00: CPU Hung up ERR 01: CPU Check Failure ERR 03: Back-up Data Error ERR 04: EEPROM Writing Error ERR 05: EEPROM Input Over Times Error ERR 11: DC Power Voltage Failure ERR 12: Internal Sensor Value is High ERR 13: Internal Sensor Value is Low ERR 14: Thermostat Alarm ERR 15: Output Failure Alarm (Abnormal output) ERR 17: Cutoff/Short of Internal Sensor ERR 18: Cutoff/Short of External

IP8101 Series

setting UP button Alarm 1 setting Alarm 2 setting PID constant Valve opening setting characteristics setting Fig. 23 Set button ( ): to change a code Mode button ( ): to set the code Down-button and up-button ( ): to select parameter or 1: See How to Change Values for modifying a value. 2: The parameter surrounded by a broken line in Fig. 23 will not be shown for the standard type (IP8101-00

HRX-OM-W032

Setting unit: 0.5 hours to For example: Stop timer setting performed at 4:30 PM to stop the product operation 1.5 hours later (at 6:00 PM). PV SV 6. Press the [MENU] key once. Returns to the display showing the circulating fluid temperature. PV SV 7. Once the run timer is set, keep the power supply to the product ON. The product will start automatically after the set time.

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 LIN -A 100 100.00 1000 1000 0 0 0.5 2 LIN -A 100.00 0 0 0.5 1 3 4 1 LIN -I 50 100.00 1000 1000 0 0 0.5 2 LIN -I 50.00 0 0 0.5 2 3 4 () 2 50mm/s 50mm 2 25mm/s Step2 Step1 100mm 2 71mm/s 100mm 1 43mm/s 100mm/s (00) 100mm 1 71mm/s

Step Motor Driver （ Pulse input type ）

Driver I/O type "NPN type" Driver version "V1.00" NPN V.00 (8) (9) ARX8300073 (10) Serial No.label of driver version A Side No.

LEC-OM038xx

When 00 01 11 70 h is input to the register, please do as following.