Max Operating Pressure: 21 MPa, Construction: Element Upward Removal, Threaded, Port Size: 04 [1/2 Threaded, 15 (1/2) Flange SSA], Pressure Indicator: Differential Pressure Indicator, Relief Valve: None, Fluid: Phosphoric Ester, Element: Micromesh, Filtration: 270μm, Fluid Direction: IN Left, Made to Order: Non-standard Filtration

Max Operating Pressure: 6 (21 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 04 [1/2 Threaded, 15 (1/2) Flange SSA], Pressure Indicator: 1 (Differential Pressure Indicator), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 20μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Max Operating Pressure: 6 (21 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 04 [1/2 Threaded, 15 (1/2) Flange SSA], Pressure Indicator: 2 (Differential Pressure Indication Switch), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 10μm

Max Operating Pressure: 6 (21 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 04 [1/2 Threaded, 15 (1/2) Flange SSA], Pressure Indicator: 1 (Differential Pressure Indicator), Relief Valve: 1 (None), Fluid: 2 (Phosphoric Ester), Element: M (Micromesh), Filtration: 270μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Max Operating Pressure: 6 (21 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 04 [1/2 Threaded, 15 (1/2) Flange SSA], Pressure Indicator: 1 (Differential Pressure Indicator), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 10μm

Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 04, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: N (w/Name Plate)

Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 04, Cylinder Port: C8 (w/One-touch Fitting for ø8), Kit: FU3 (w/5 m Cable, Top Entry)

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: None, Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: K (Reverse Flow Mechanism), Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Accessory: H (Set Nut for Panel Mount), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: N (NPT), Port Size: 04 (1/2), Accessory: H (Set Nut for Panel Mount), Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: F (G), Port Size: 04 (1/2), Accessory: None, Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Accessory: BG (B+G), Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Accessory: None, Specifications: R (Flow Direction: Right to Left), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: N (NPT), Port Size: 04 (1/2), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 3 (0.008 to 0.6 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Application: 21-AF (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Bracket: None, Bowl Type: 8 [Metal w/Level Gauge (Size 30 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]

Process Pump

E 21 S LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

Clean Regulator

Port size SRP SRH3000 URJF 1/4 SRH4000 URJF 3/8 Piping port size Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 With metal gasket seal fitting With metal gasket seal fitting Symbol 01 02 03 04 A2 A3 X210 EPDM seals SRF With relief port fittings (Applicable tube O.D.: 4) X211 X216 Machined relief port M5 thread ITV Knob operation product with reduced torque X233 IC X234 Aluminum body ITVH Note) The pressure