ports for 1/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Part Number Color .004 F-2815-041 Purple .005 F-2815-050 Lime .006 F-2815-051 Red .007 F-2815-071

KR

(mm) <M5> (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

of stations 02 2 stations Applicable individual EXH spacer assembly SYJ5000-17-1A Nil F N T Rc G NPT NPTF : : R port 1/8 20 20 stations A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size How to Order Type 41 (5 port / base mounted) 10 SS5YJ5 41 05 M5 Clean series Number of stations P, R port thread type -+ -+ 02 2 stations R port 1/8 R P : : Nil F N T Rc G NPT NPTF A, B port M5 x 0.8 20 20 stations

Table of Contents

(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female

5 Port Solenoid Valve Series VQZ1000/2000/3000

A 4 B 2 45 B A R2 3 P 1 R1 5 Manual override 72.8 + + 57 41.6 26.5 2 x PE port 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (Not used) 21 (18) 21 (18) M5 x 0.8 (External pilot port) 33 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 66 ( ): VQZ325-G1-02 L-type plug connector (L): VQZ325 (R)-L10 1 02 03 DIN terminal (Y): VQZ325 (R)-Y10 1 02 03 136.8 [141.2] Approx. 300 (Lead wire length

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

Speed Controller with Indicator

-02-04 (S) 4 8.2 AS221FSG-02-06 (S) 6 10.4 23.4 32.7 (32.8) AS221FSG-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FSG-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-02-10 (S) 10 15.9 26.7 37 35.7 15.6 48 (49) AS321FSG-02-12 (

SYJ300/500/700

VQZ VZ VS VFN 4-4-25 Series SYJ500 Manifold for Internal Pilot Type How to Order Applicable solenoid valve SYJ512--M5 SYJ512M--M5 SYJ522--M5 SYJ522M--M5 A port M5 x 0.8 Type 20 SS3YJ5 20 05 Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port

ZP3

x 0.8 Female thread 02 2 One-touch fitting 04 4 U2 For 2 polyurethane tubing Barb fitting U4 For 4 soft tubing 8 B5 M5 x 0.8 8 Model M5 x 0.8 8 0 0.1 M5 x 0.8 Effective thread depth 4 Vacuum inlet direction q Pad dia.

Stainless Steel One-touch Fittings Series KG

Nylon Urethane M5 Weight (g) D L1 L2 L3 A M P M5 0.8 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 29.5 32 36 11 10.4 18.5 24 25.5 4.3 4.3 10 12 21 4 1 8 1 4 26.5 27.5 16 10.4 30 6.0 6.0 30.5 14 M5 0.8 26.5 33 29.5 14 16 23 36 4.3 4.3 13 1 8 29.5 36 32 12.8 21 17 12.8 6 1 4 33 39.5 33.5

Modular F.R.L. Unit

03 04 Note 6) VHS40-06 01 02 VHS20VHS30VHS4002 03 02 03 04 06 E500-06 02 03 04 E200E30001 02 03 Note 6) Piping adapter E400E100-M5 02 03 04 06 Note 6) Pressure switch with piping adapter IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-40 Note 6) Y14-M5 Y2401 02 Y3401 02 Y4402 03 Y5403 04 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note 3) In case of AS121F-M3-02 and AS121F-M5-02, polyurethane only. Note 4) M3, M5, 10-32UNF type ports are not available with seals. Note 5) Brass parts are all electroless nickel plated.

Flow Control Equipment

Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

KG

(mm) <M5> (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

5 Port Solenoid Valve

fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Max. 24 stations) 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 108 125 135.5 97 125 135.5 152 175 185.5 119 137.5 148 141 162.5 173 130 150 160.5 86 112.5 123 75 100 110.5 64 87.5 98 53

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Applicable individual EXH spacer assembly 02 2 stations Nil F N T Rc G NPT NPTF : : R port 1/8 Refer to page 330. 20 20 stations A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size CE-compliant Nil Q CE-compliant How to Order Type 41 (5 port/Base mounted) M5 SS5YJ5 41 05 10 Stations Clean series 02 2 stations P, R port thread type CE-compliant -+ -+ : : Nil Q CE-compliant R port 1/8 R P Nil F

0.4

C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5 137.5 162.5 110.5

KP/KPQ/KPG

1 15-5-13 Series KP/KPG Dimensions Male Connector: KPQH, KPGH (M5) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06