MGP

122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5 201 to 400st 122 122 20 to 39st 10 16 40 to 124st 27 32 125 to 200st 51 51 201 to 400st 69 68.5 20 25 20 25 A E A E Bore size (mm) Bore size (mm) 25 to 74st 97 97 106.5 106.5 115 137 75 to 200st 102 102 118 118 142 162 201 to 400st 140 140 161 161 193 203 25 to 74st

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

MG

122 69 68.5 122 122 69 68.5 8-19-22 Compact Guide Cylinder Series MGP MGPM, MGPL: 32 to 63 4-YY depth YL T-slot dimensions XA depth XL H7 b a MX X 0.02 c d X XA H7 MTS e XB MY e 9.5 11 13.5 18.5 XAH7 d 3.5 4 4.5 7 c 5.5 5.5 7.5 10 b 10.5 10.5 13.5 17.8 a 6.5 6.5 8.5 11 Bore size (mm) 32 40 50 63 CY XC XL Section XX MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Air Cylinder

Bore size B C GA FB NA WA S Z 10 15 17 7.5 14.5 21 14.4 66 122 16 18.3 20 7.5 19 21 14.4 67 123 70 Air Cylinder: Standard Type Single Acting, Spring Return/Extend RoHS CJ2 Series 6, 10, 16 How to Order CJ1 S 45 B CJ2 16 Z CJP CJ2 CJ2 45 16 B CDJ2 M9BW S B Z With auto switch JCM q w e r t y u i o !0 !

Air Cylinder

lock Double end lock Head end lock Rod end lock Double end lock Head end lock Rod end lock Double end lock Head end lock Rod end lock Double end lock 20 143 144 154 152 153 163 118 119 129 128 129 139 25 147 148 158 156 157 167 122 123 133 132 133 143 32 147 150 158 156 159 167 122 125 133 132 135 143 40 182 185 190 193 196 201 148.5 151.5 156.5 159 162 167 Bore size (mm) 258 CBM2 Series

Made to Order

Male thread 129 147 170 Female thread 109 118 134 32 40 50 63 17 8 3 5 38 21 26 26 8 9 9 3 3 3 3.5 4.5 5.5 47 58 72 66 30 158 122 170 134 On the axial foot type and the rod side flange type, the mounting bracket is wedged and bolted between the cylinder and the scraper at the time of shipment.

C76

96 129 7 10 97 97 122 9 12 42.5 58.2 72.3 6-10-10 11 Series C76 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Dimensions [First angle projection] Double acting, Single rod Rubber cushion: C76E Without magnet, Built-in magnet Bore Stroke XB BE KV WH G G HR EE EE 8 K SW CJ1 D 45 Eh8 CJP NB NB C CJ2 TD H9 TD H9 KK CM2 TW KW 1.5 2-TC TW N FA AM N CG1 KV S + Stroke H MB

C76

Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) AM 20 24 BE C 12 14 FA 30 35 K 10 12 KK KV 38 50 TDH9 TW 34.5 42.5 D 37.5 46.5 FB 14 16 KA KW 7 8 WH 38 45 EE G 9 12 N 17(19) 22(25) XB 47 57 H 58 69 NB 34.5 42.5 XC ZZ 140 174 Eh8 HR S 68 89 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122

CJ2

B GA LB NA WA WW S Z Bore 10 16 15 7.5 16.5 21 14.5 4.5 66 122 18 7.5 23 21 14.5 5.5 67 123 1.3-18 Standard: Double Acting Double Rod Series CJ2W Flange (F) CJ2WF Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 With air cushion: CJ2WF A Bore size Stroke CS1 Material: Iron Part No.

Special Specifications:

Discontinued Products and Equivalent Products Discontinued Product equivalent External dimension of a product Width x Depth x Height 76 x 76 x 178 122 x 122 x 259 160 x 160 x 311 220 x 220 x 461 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 (210) 122 x 122 x 259 160 x 160 x 311 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 106 x 106 x 225 122 x 122 x 259 160 x 160 x 311 76 x 76 x 152

CJ2

MM NA NN S T Z Bore size (mm) A GA H FZ FY FX FT FC FB F D 6 15 M3 x 0.5 16 M6 x 1.0 61 (66) 3 117 (122) 10 16 32 14 24 1.6 3 4.5 13 8 14.5 28 12.5 49 8 M4 x 0.7 32 14 24 1.6 4 4.5 13 8 15 28 M8 x 1.0 105 12.5 50 8 M5 x 0.8 42 20 33 2.3 5 5.5 19 8 15 28 M10 x 1.0 106 ( ) in S and Z dimensions: With auto switch With Air Cushion/Dimensions other than the table below are the same as the

Dual Rod Cylinder Series CXSJ/CXS

132 142 147 152 162 70 50 40 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202 97 182 92 112 117 122 127 132 142 152 157 162 172 102 107 568 Series CXS Dual Rod Cylinder Basic Type Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V

CXS

132 142 147 152 162 CXS25 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202 70 50 40 97 182 92 112 117 122 127 132 142 152 157 162 172 102 107 CXS32 17 Series CXS Auto Switch Proper Mounting Positions for Stroke End Detection Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

117 112 107 102 97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182 172 162 157 152 142 132 127 122 117 112 107 102 97 92 212 202 192 187 182 172 162 157 152 147 142 137 132 127 122 70 50 40 8-29-9 10 Series CXS Proper Auto Switch Mounting Position (Detection at stroke end) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating

Base Mounted Wiring: Plug-in, Insert Plug w/Lead Wire, Stations: 12 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Clamp Cylinder with Lock

Width across flats 44 Clevis width R15 F +0.3 0 +0.4 0 CLK2GB: 19.5 CLK2GA: 16.5 27 Z + Stroke 97 40 ZZ + Stroke 57 (mm) Symbol BX BY D F GA IA K L M MA N NA W WA Z ZZ Hs Bore size 40 56 54 16 44 77 47 14 55 M12 x 1.5 M4 x 7 86 51.5 5 12.5 114 226 45.5 50 64 64 20 55 78.5 58 17 58 M16 x 1.5 M4 x 7 87.5 52.5 5.5 14 118.5 230.5 51 63 74 74 20 69 82 72 17 58 M16 x 1.5 M5 x 7 91 53.5 5.5 19 122

Electric Actuator

Note 4) The number in brackets indicates when the direction of return to origin has changed. 360 510 8 3 406 480 610 10 4 506 600 710 12 5 606 24 Series 11-LEFS Electric Actuator/Slider Type Ball Screw Drive Clean room specification AC Servo Motor Specific Product Precautions Model Selection Dimensions: Ball Screw Drive ( ) 0.030 0 11-LEFS32 5H9 depth 5 42 70 (122) Servo Motor (24 VDC)/Step

Electric Actuator/Slider Type

cable Lock cable (3.5) 15 20 Motor cable (2 x 5) 20 20 Cable length 400 65 65 Cable length 250 132.5 Cable length 250 Motor cable (2 x 5) 5H9 ( ) depth 8 (Depth of counterbore 3) + 0.030 0 65 (2.4) 137 94 (2.4) 73.5 116.5 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) 7.5 44 7.5 Body mounting reference plane Note 1) 60 5.5 5H9 ( ) depth 8 (Depth of counterbore 3) + 0.030 0 42 70 122

24

12 0 6.5 44 25 78.5 85 122 16 0 6.5 43.5 75 st or less Over 75 st to 175 st Over 175 st 75 st or less Over 75 st to 175 st Over 175 st 20 80 104 122 10 2 26 44 25 85.5 104.5 122 13 7 26 43.5 End Lock Mechanism Dimensions [mm] Bore size [mm] DL DM HR HN 20 21 19 10.5 22 25 26.5 16 8 19.5 474 Compact Guide Cylinder With End Lock MGP Series Dimensions: 32 to 63 4 x NN through 4 x MM depth ML