XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

PSxx-OMG0001CN

(A/D ) ( ) 6 2030 20 80 mA (Er1,2) () ( (Er4,6,7,8) ) DC1224 V DC1224 V Er1,2) Er4,6,7,8) 7 (HHH) "HHH" "LLL" Er3) (LLL) (Er3) 7F.S. -27No.PS-OMG0001CN-H No. DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

DOC1023126

Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .

CEx-OMB0060

Signal Meaning 1 D0 Digit of 10-2 Bit0 19 D12 Digit of 101 Bit0 2 D1 Digit of 10-2 Bit1 20 D13 Digit of 101 Bit1 3 D2 Digit of 10-2 Bit2 21 D14 Digit of 101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3

CC

35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50

Air-hydro Unit

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

ZFC Series

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF5000 series manifold, Metric threads (Rc(PT)), Manifold type: B mount (single base), Maximum stations: 15, Port sizes

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF5000 series manifold, Metric threads (Rc(PT)), Manifold type: B mount (single base), Maximum stations: 15, Port sizes

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF5000 series manifold, Metric threads (Rc(PT)), Manifold type: B mount (single base), Maximum stations: 15, Port sizes

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF5000 series manifold, Metric threads (Rc(PT)), Manifold type: B mount (single base), Maximum stations: 15, Port sizes

Pressure Sensor

kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Metric size Type (Recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate (/min (ANR)) Symbol Tubing size 100 200 101 201 Max. 20 Max. 50 Max. 20 Max. 50 Metric size (Release bushing: Light gray) 06 6 08 8 Inch size (Release bushing: Light gray) JIS Symbol Inch size Symbol 03 Tubing size 5/32" Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Element

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Electric Grippers

Basic Compact LEHZ10 LEHZ10L 100 100 80 80 Overhang H [mm] Overhang H [mm] 60 60 70%, 40% 40% Pushing force 100% 40 40 70% Pushing force 100% 20 20 0 0 20 40 60 80 100 0 0 20 40 60 100 80 Gripping point L [mm] Gripping point L [mm] LEHZ16 LEHZ16L 140 140 120 120 Overhang H [mm] Overhang H [mm] 100 100 Pushing force 100%, 70%, 40% 70%, 40% 80 80 Pushing force 100% 60 60 40 40 20 20 0 0 20

AC Servo Motor Driver (Pulse input type/Positioning type ）

B1 AWG 20 B2 Note.