Modular Design with Uniform Body Style

-D IS10M-40-D IS10M-50-D IS10M-60-D p. 54 Slim type IS10M-20-1-D IS10M-30-1-D IS10M-40-1-D IS10M-50-1-D IS10M-60-1-D IS10T-50-m02-D IS10T-50-m03-D IS10T-50-m04-D IS10T-50-m06-D IS10T-30-m01-D IS10T-30-m02-D IS10T-30-m03-D IS10T-40-m02-D IS10T-40-m03-D IS10T-40-m04-D IS10T-60-m03-D IS10T-60-m04-D IS10T-60-m06-D Pressure switch with T-spacer*5, *6 p. 55 IS10T-20-m01-D IS10T-20-m02-D IS10L-30

MY1

Refer to page 30.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

shaft side 40 40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Modular F.R.L. Units

of 6P (L, R, Z) is 0.2 to 0.6 MPa (30 to 90 psi). 2 For pipe thread type: NPT only.

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 55 50 10 60 50 65 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9V 50 + 30 65 + 30 10 + 30 50 + 30 55 + 30 60 + 30 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

CKZ2N

0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 R37 10.5 20 0.03 24 0.03 16 26 30 R9 30 NAAMS code Weight kg (lbs) A B C D E F G H I J K L M N O P Q R S T U V W Part no.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Modification of Rod End Configuration 1 CH2 Series Mounting brackets Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end configuration pattern symbol A1 A2 A3 CO.5 30 30 30 30 D D D d d Width across flats A4 A5 A6 30 30 30 D D D D d D d 30 30 Width across flats Width across flats Width across flats Note) Female thread effective depth should be no more than twice

LJ1H

Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact

Sine Rodless Cylinder Series REA/REB

RZQ Cushion Stroke DAllowable load mass Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model -X 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 Individual -X 983 Series REAH Stroke Adjustment The adjusting bolt is adjusted to the optimum position for smooth acceleration

Rotary Table/Rack & Pinion Style Series MSQ

FU) UV 63 73 76 87 HA 24 30 30 34 DG 45h8 60h8 65h8 75h8 FE 9.5 13.5 13.5 15.5 DH 46h8 61h8 67h8 77h8 DI 20H8 28H8 32H8 35H8 DJ 35h8 40h8 48h8 54h8 FD 15.5 19.5 19.5 21.5 Size 10 20 30 50 Size 10 20 30 50 31.5 34.7 34.7 51.7 DJ (mm) DD 45h9 60h9 65h9 75h9 D 27 34 37 50 BE 60 76 84 100 BD 27.8 30 32 37.5 BC 34.5 46 50 63 BB 9.5 12 12 15.5 BA 4 5 5 6 AY 12 14 14 19 AX 15.5 16 18.5 22 AW 20

Modular F.R.L. Units

Note 2) When the compressor oil mist discharge concentration is 30 mg/m3 (ANR).

Vacuum Ejector Series ZM

30 30 Suction flow rate 20 20 20 Suction flow rate 10 10 10 Flow characteristics are expressed in ejector vacuum pressure and suction flow.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

For detailed specifications, refer to page 8-30-1.

C95

50 (n 2) 75+ 50 (n 2) 75+ 50 (n 2) 80 + 50 (n 2) 80 + 50 (n 2) 85 + 50 (n 2) n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 35 + 30 (n 2) 35 + 30 (n 2) 70 + 30 (n 2) 75 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n (Different sides) n = 2, 4, 6, 8 n = 2,

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

1.1

8 8 6 6 4 4 2 2 0 0 0 10 20 30 40 40 0 10 20 30 Circulating fluid temperature (C) Circulating fluid temperature (C) 16 Series HRG Thermo-cooler Pump Capacity HRG001-A, HRG001-W HRG002-A, HRG002-W 0.3 0.3 30 30 Outlet port [60 Hz] Outlet port [60 Hz] Outlet port [50 Hz] Outlet port [50 Hz] 0.2 0.2 20 20 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 0.1 0.1 10 10 Return port

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

MHZ

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 () 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.