Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

03 02 03 VVQ4000-P-1(Plug-in type) 163 (Plug-in type) VVQ4000-P-5(Plug lead type) 115.5 (Plug lead type) 25 12.5 73 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 26.4 1(P) 4(A) Rc 3/8 2(B) 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 02 03 VVQ4000-R-1(Plug-in type) 163 (Plug-in

AZ1000

Vespel is a registered trademark of DuPont. ) If connection size differs, flow characteristics also differ. 41 Single Stage Regulator for Ultra High Purity High flow (Tied-diaphragm) Series AZ9200 For UHP gas delivery Inlet pressure : Max. 300 psig (2.1 MPa) Flow capacity to 2000 slpm Body material: 316L SS How to Order Port Number q w e AZ92 S FV12 FV12 02 2PW Delivery pressure Bonnet option

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Symbol Stations 02 24 Symbol Stations 02 24 D side U side 1 3 2 Stations 2 stations 24 stations 2 stations 24 stations Up to 24 solenoids possible. PG: Flat ribbon cable (20 pins) PH: Flat ribbon cable (10 pins) SUP/EXH block (D side mounting) Note Up to 18 solenoids possible. Note Up to 8 solenoids possible.

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .003 Gold F-2815-031-B80-NORYL F-2815-031-B85-NORYL